Semiconductor Device and Method of Forming Shielding Layer After Encapsulation and Grounded Through Interconnect Structure
First Claim
1. A method of manufacturing a semiconductor device, comprising:
- providing a substrate containing a conductive layer;
forming a solder bump over the substrate and electrically connected to the conductive layer;
mounting a semiconductor die to the substrate;
depositing an encapsulant over the semiconductor die and solder bump;
forming a channel in the encapsulant to expose the solder bump; and
forming a shielding layer over the encapsulant and semiconductor die, the shielding layer extending into the channel and electrically connecting to the solder bump to provide isolation from inter-device interference.
5 Assignments
0 Petitions
Accused Products
Abstract
A semiconductor device has a substrate containing a conductive layer. An interconnect structure is formed over the substrate and electrically connected to the conductive layer. A semiconductor component is mounted to the substrate. An encapsulant is deposited over the semiconductor component and interconnect structure. A channel is formed in the encapsulant to expose the interconnect structure. Solder paste is deposited in the channel prior to forming the shielding layer. A shielding layer is formed over the encapsulant and semiconductor component. The shielding layer can be conformally applied over the encapsulant and semiconductor die and into the channel. The shielding layer extends into the channel and electrically connects to the interconnect structure. A docking pin is formed on the shielding layer, which extends into the channel and electrically connects to the interconnect structure. A chamfer area is formed around a perimeter of the shielding layer.
60 Citations
25 Claims
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1. A method of manufacturing a semiconductor device, comprising:
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providing a substrate containing a conductive layer; forming a solder bump over the substrate and electrically connected to the conductive layer; mounting a semiconductor die to the substrate; depositing an encapsulant over the semiconductor die and solder bump; forming a channel in the encapsulant to expose the solder bump; and forming a shielding layer over the encapsulant and semiconductor die, the shielding layer extending into the channel and electrically connecting to the solder bump to provide isolation from inter-device interference. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A method of manufacturing a semiconductor device, comprising:
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providing a substrate containing a conductive layer; forming an interconnect structure over the substrate and electrically connected to the conductive layer; mounting a semiconductor component to the substrate; depositing an encapsulant over the semiconductor component and interconnect structure; forming a channel in the encapsulant to expose the interconnect structure; and forming a shielding layer over the encapsulant and semiconductor component, the shielding layer being electrically connected to the interconnect structure to provide isolation from inter-device interference. - View Dependent Claims (9, 10, 11, 12, 13)
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14. A method of manufacturing a semiconductor device, comprising:
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providing a substrate; mounting a semiconductor component to the substrate; depositing an encapsulant over the semiconductor component; forming a channel in the encapsulant; and forming a shielding layer over the encapsulant and semiconductor component. - View Dependent Claims (15, 16, 17, 18, 19, 20)
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21. A semiconductor device, comprising:
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a substrate containing a conductive layer; an interconnect structure formed over the substrate and electrically connected to the conductive layer; a semiconductor component mounted to the substrate; an encapsulant deposited over the semiconductor component and interconnect structure; a channel formed in the encapsulant to the interconnect structure; and a shielding layer formed over the encapsulant and semiconductor component, the shielding layer being electrically connected to the interconnect structure to provide isolation from inter-device interference. - View Dependent Claims (22, 23, 24, 25)
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Specification