RESONATOR

• US 20100277262A1
• Filed: 11/12/2008
• Published: 11/04/2010
• Est. Priority Date: 11/19/2007
• Status: Active Grant

• Current Assignee: NXP B.V. (NXP Semiconductors NV)
• Original Assignee: NXP B.V. (NXP Semiconductors NV)
• Inventors: Phan Le, Kim, Van Beek, Jozef T. M.
• Granted Patent: US 8,269,578 B2
• Time in Patent Office: Days
• US Class Current: 333/219
• CPC Class Codes: H03H 2009/02496 Horizontal, i.e. parallel to the substrate plane
• CPC Class Codes: H03H 2009/2442 Square resonators
• CPC Class Codes: H03H 9/02244 of microelectro-mechanical resonators
• CPC Class Codes: H03H 9/02259 Driving or detection means
• CPC Class Codes: H03H 9/2463 Clamped-clamped beam resonators
• CPC Class Codes: H03H 9/505 for microelectro-mechanical filters

Abstract

A resonator comprises a resonator mass (34), a first connector (30) on a first side of the mass connected between the resonator mass and a first fixed mounting and a second connector (32) on a second, opposite, side of the mass connected between the resonator mass and a second fixed mounting. Drive means drives the mass (34) into a resonant mode in which it oscillates in a sideways direction, thereby compressing one of the first and second connectors while extending the other of the first and second connectors.

Claims

1. A resonator, comprising:

a resonator mass;

a first connector on a first side of the mass connected between the resonator mass and a first fixed mounting;

a second connector on a second, opposite, side of the mass connected between the resonator mass and a second fixed mounting; and

drive means for driving the mass into a resonant mode in which it oscillates in a sideways direction, thereby compressing one of the first and second connectors while extending the other of the first and second connectors.

2. A resonator as claimed in claim 1, further comprising a sensor arrangement for detecting the mass oscillation.

3. A resonator as claimed in claim 2, wherein the sensor arrangement comprises a piezoresistive sensor arrangement.

4. A resonator as claimed in claim 2, wherein the sensor arrangement comprises a capacitive sensor arrangement.

5. A resonator as claimed in claim 1, wherein the drive means comprises an electrode arrangement on each side of the mass.

6. A resonator as claimed in claim 5, wherein each electrode arrangement comprises a first electrode and a second electrode on opposite sides of a respective one of the connectors.

7. A resonator as claimed in claim 5, wherein the first connector comprises first and second parallel arms, and the corresponding electrode arrangement comprises an electrode between the arms of the first connector arrangement, and wherein the second connector comprises first and second parallel arms, and the corresponding electrode arrangement comprises an electrode between the arms of the second connector arrangement.

8. A resonator as claimed in claim 5, wherein the electrode arrangements are driven with a voltage having the same dc component and opposite phase ac components, and the mass and connectors are earthed.

9. A resonator as claimed in claim 5, wherein one electrode arrangement is driven with a dc voltage, and the other is driven with an ac voltage having a dc components corresponding to the dc voltage, and the mass and connectors are earthed.

10. A resonator as claimed in claim 1, wherein each connector comprises a plurality of arms in parallel.

11. A resonator as claimed in claim 1, wherein the resonator mass comprises a plurality of mass elements, with adjacent mass elements connected together by a respective intermediate connector.

12. A resonator as claimed in claim 11, wherein the resonator mass comprises two mass elements connected together by an intermediate connector, and wherein the two mass elements vibrate in antiphase.