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MICRO SCANNER DEVICE AND METHOD FOR CONTROLLING MICRO SCANNER DEVICE

  • US 20100277783A1
  • Filed: 12/19/2008
  • Published: 11/04/2010
  • Est. Priority Date: 01/10/2008
  • Status: Active Grant
First Claim
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1. A micro scanner device comprising:

  • a fixing frame serving as an outer frame;

    an axis portion;

    a holder having a cantilever beam structure in which one end of the holder is connected to the axis portion and another end of the holder is fixed to the fixing frame;

    a drive portion generating, in response to a voltage applied thereto, a force for deforming the holder;

    a moving portion swinging with respect the to the axis portion according to displacement of the axis portion; and

    a drive circuit applying to the drive portion a voltage having a frequency that is approximate to or equal to a natural frequency of the micro scanner itself and that generates in the holder at least one node intersecting with respect to a length of the holder.

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