SILICON BIOSENSOR AND MANUFACTURING METHOD THEREOF
First Claim
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1. A silicon biosensor comprising:
- a light source performing self emission;
a light detector generating a photoelectric current corresponding to an amount of incident light;
an optical fiber transmitting the light from the light source to the light detector; and
a micro fluidic channel adjusting an optical transmission rate of the optical fiber according to an antibody-antigen reaction when the antibody-antigen reaction occurs.
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Abstract
A silicon biosensor and a manufacturing method thereof is provided, the silicon biosensor includes: a light source performing self emission a light detector generating a photoelectric current corresponding to an amount of incident light an optical fiber transmitting the light from the light source to the light detector and a micro fluidic channel adjusting an optical transmission rate of the optical fiber according to an antibody-antigen reaction when the antibody-antigen reaction occurs. The silicon biosensor can be easily integrated or bonded with a silicon electronic device, so that it is possible to manufacture the biosensor with a low price, under mass production.
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Citations
14 Claims
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1. A silicon biosensor comprising:
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a light source performing self emission; a light detector generating a photoelectric current corresponding to an amount of incident light; an optical fiber transmitting the light from the light source to the light detector; and a micro fluidic channel adjusting an optical transmission rate of the optical fiber according to an antibody-antigen reaction when the antibody-antigen reaction occurs. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. A method of manufacturing a silicon biosensor, the method comprising:
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sequentially depositing a first silicon film, a silicon nanocrystal, and a second silicon film on an upper surface of a silicon substrate; separating the first silicon film, the silicon nanocrystal, and the second silicon film into two regions by using an insulator forming a light source with the first silicon film, the silicon nanocrystal, and the second silicon film layered on one side of the insulator, and forming a light detector with the first silicon film, the silicon nanocrystal, and the second silicon film on the remaining side of the insulator forming an optical fiber on an upper surface of the insulator and forming a micro fluidic channel on an upper surface of the optical fiber. - View Dependent Claims (12, 13, 14)
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Specification