PLASMA PROCESS APPARATUS AND PLASMA PROCESS METHOD
First Claim
1. A plasma process apparatus that applies a plasma process to an object to be processed, the plasma process apparatus comprising:
- a cylindrical processing container configured to be evacuatable to vacuum;
a holding unit configured to hold plural objects to be processed and inserted into and to be extracted from the cylindrical processing container;
a gas supplying unit configured to supply a gas into the processing container;
an activating unit configured to be located along a longitudinal direction of the processing container and to activate the gas by plasma generated by a high frequency power;
a cylindrical shield cover configured to surround a periphery of the processing container and to be connected to ground for shielding from high frequency; and
a cooling device configured to cause the cooling gas to flow through a space between the cylindrical shield cover and the cylindrical processing container during the plasma process.
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Abstract
A disclosed plasma process apparatus is disclosed that applies a plasma process to an object to be processed, including a cylindrical processing container configured to be evacuatable to vacuum, a holding unit configured to hold plural objects to be processed and inserted into and to be extracted from the cylindrical processing container, a gas supplying unit configured to supply a gas into the processing container, an activating unit configured to be located along a longitudinal direction of the processing container and to activate the gas by plasma generated by a high frequency power, a cylindrical shield cover configured to surround a periphery of the processing container and to be connected to ground for shielding from high frequency, and a cooling device configured to cause the cooling gas to flow through a space between the cylindrical shield cover and the cylindrical processing container during the plasma process.
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Citations
20 Claims
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1. A plasma process apparatus that applies a plasma process to an object to be processed, the plasma process apparatus comprising:
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a cylindrical processing container configured to be evacuatable to vacuum; a holding unit configured to hold plural objects to be processed and inserted into and to be extracted from the cylindrical processing container; a gas supplying unit configured to supply a gas into the processing container; an activating unit configured to be located along a longitudinal direction of the processing container and to activate the gas by plasma generated by a high frequency power; a cylindrical shield cover configured to surround a periphery of the processing container and to be connected to ground for shielding from high frequency; and a cooling device configured to cause the cooling gas to flow through a space between the cylindrical shield cover and the cylindrical processing container during the plasma process. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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18. A plasma process method of processing an object to be processed by a plasma process while enabling cooling of an inside of a plasma apparatus by taking in and exhausting a gas to evacuate an atmosphere of the inside, the plasma process method comprising:
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measuring a temperature of the atmosphere of the inside of the plasma process apparatus while the plasma is not generated; and stopping taking the gas into the inside of the plasma process apparatus during the plasma process in a case where the measured temperature is lower than a first preset threshold temperature when the atmosphere is evacuated at a preset volumetric flow rate. - View Dependent Claims (19, 20)
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Specification