METHOD AND SYSTEM FOR CLOSE PROXIMITY CATALYSIS FOR CARBON NANOTUBE SYNTHESIS
First Claim
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1. A method for carbon nanotube synthesis comprising:
- providing in a growth chamber, a substrate in close proximity with a surface of a first plate comprising a catalyst;
heating the growth chamber to a temperature sufficient to cause transfer of catalytic particles from the first plate to the substrate; and
growing carbon nanotubes on the substrate by directing feed gas to the substrate.
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Abstract
A method for carbon nanotube synthesis can include providing in a growth chamber, a substrate in close proximity with a surface of a first plate having a catalyst. The method can also include heating the growth chamber to a temperature sufficient to cause transfer of catalytic particles from the first plate to the substrate. The method can also include growing carbon nanotubes on the substrate by directing feed gas to the substrate.
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Citations
20 Claims
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1. A method for carbon nanotube synthesis comprising:
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providing in a growth chamber, a substrate in close proximity with a surface of a first plate comprising a catalyst; heating the growth chamber to a temperature sufficient to cause transfer of catalytic particles from the first plate to the substrate; and growing carbon nanotubes on the substrate by directing feed gas to the substrate. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A system for carbon nanotube synthesis, comprising:
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a growth chamber; a heater configured to heat the growth chamber; a first plate comprising a catalyst, wherein the first plate is configured to fit within the growth chamber, and wherein a surface of the first plate faces a substrate; and a substrate configured to fit in close proximity with the surface of the first plate. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification