Method For Releasing a Thin-Film Substrate
First Claim
1. A method for fabrication of a thin-film semiconductor substrate by releasing it from a semiconductor template through the use of a porous semiconductor layer, the method comprising:
- forming a porous semiconductor layer on a semiconductor template, said porous semiconductor layer conformal to said semiconductor template;
forming a thin-film semiconductor substrate on said porous semiconductor layer, said thin-film semiconductor substrate conformal to said porous semiconductor layer; and
selectively etching said porous semiconductor layer with an etchant to separate said thin-film semiconductor substrate and said semiconductor template.
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Abstract
The present disclosure relates to methods for selectively etching a porous semiconductor layer to separate a thin-film semiconductor substrate (TFSS) having planar or three-dimensional features from a corresponding semiconductor template. The method involves forming a conformal sacrificial porous semiconductor layer on a template. Next, a conformal thin film silicon substrate is formed on top of the porous silicon layer. The middle porous silicon layer is then selectively etched to separate the TFSS and semiconductor template. The disclosed advanced etching chemistries and etching methods achieve selective etching with minimal damage to the TFSS and template.
120 Citations
20 Claims
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1. A method for fabrication of a thin-film semiconductor substrate by releasing it from a semiconductor template through the use of a porous semiconductor layer, the method comprising:
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forming a porous semiconductor layer on a semiconductor template, said porous semiconductor layer conformal to said semiconductor template; forming a thin-film semiconductor substrate on said porous semiconductor layer, said thin-film semiconductor substrate conformal to said porous semiconductor layer; and selectively etching said porous semiconductor layer with an etchant to separate said thin-film semiconductor substrate and said semiconductor template. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification