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MICROELECTROMECHANICAL STRUCTURE WITH ENHANCED REJECTION OF ACCELERATION NOISE

  • US 20100281977A1
  • Filed: 05/07/2010
  • Published: 11/11/2010
  • Est. Priority Date: 05/11/2009
  • Status: Active Grant
First Claim
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1. An integrated MEMS structure, comprising:

  • a substrate;

    a driving assembly anchored to the substrate and configured to be actuated with a driving movement;

    a first sensing mass and a second sensing mass suspended above the substrate;

    first and second elastic supports, respectively coupling the first and second masses to the driving assembly and configured to enable the sensing masses to perform a movement of detection along a first direction of detection, in response to an external stress; and

    a coupling assembly configured to couple mechanically the first sensing mass and the second sensing mass and to couple their vibration modes, the coupling assembly further comprising;

    a rigid element between the first and the second sensing masses having a point of constraint in an intermediate position between the first and second sensing masses; and

    first and second elastic connectors to connect respective ends of the rigid element to the first and second sensing masses, the first and second elastic connectors and the rigid element being configured to present a first stiffness to a movement in phase-opposition, and a second stiffness, greater than the first stiffness, to a movement in phase of the first and second sensing masses along the first direction of detection.

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