MICROELECTROMECHANICAL STRUCTURE WITH ENHANCED REJECTION OF ACCELERATION NOISE
First Claim
1. An integrated MEMS structure, comprising:
- a substrate;
a driving assembly anchored to the substrate and configured to be actuated with a driving movement;
a first sensing mass and a second sensing mass suspended above the substrate;
first and second elastic supports, respectively coupling the first and second masses to the driving assembly and configured to enable the sensing masses to perform a movement of detection along a first direction of detection, in response to an external stress; and
a coupling assembly configured to couple mechanically the first sensing mass and the second sensing mass and to couple their vibration modes, the coupling assembly further comprising;
a rigid element between the first and the second sensing masses having a point of constraint in an intermediate position between the first and second sensing masses; and
first and second elastic connectors to connect respective ends of the rigid element to the first and second sensing masses, the first and second elastic connectors and the rigid element being configured to present a first stiffness to a movement in phase-opposition, and a second stiffness, greater than the first stiffness, to a movement in phase of the first and second sensing masses along the first direction of detection.
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Abstract
An integrated MEMS structure includes a driving assembly anchored to a substrate and actuated with a driving movement. A pair of sensing masses suspended above the substrate and coupled to the driving assembly via elastic elements is fixed in the driving movement and performs a movement along a first direction of detection, in response to an external stress. A coupling assembly couples the pair of sensing masses mechanically to couple the vibration modes. The coupling assembly is formed by a rigid element, which connects the sensing masses and has a point of constraint in an intermediate position between the sensing masses, and elastic coupling elements for coupling the rigid element to the sensing masses to present a first stiffness to a movement in phase-opposition and a second stiffness, greater than the first, to a movement in phase, of the sensing masses along the direction of detection.
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Citations
18 Claims
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1. An integrated MEMS structure, comprising:
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a substrate; a driving assembly anchored to the substrate and configured to be actuated with a driving movement; a first sensing mass and a second sensing mass suspended above the substrate; first and second elastic supports, respectively coupling the first and second masses to the driving assembly and configured to enable the sensing masses to perform a movement of detection along a first direction of detection, in response to an external stress; and a coupling assembly configured to couple mechanically the first sensing mass and the second sensing mass and to couple their vibration modes, the coupling assembly further comprising; a rigid element between the first and the second sensing masses having a point of constraint in an intermediate position between the first and second sensing masses; and first and second elastic connectors to connect respective ends of the rigid element to the first and second sensing masses, the first and second elastic connectors and the rigid element being configured to present a first stiffness to a movement in phase-opposition, and a second stiffness, greater than the first stiffness, to a movement in phase of the first and second sensing masses along the first direction of detection. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. An electronic device, comprising:
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an integrated MEMS structure further comprising; a substrate; a driving assembly anchored to the substrate and configured to be actuated with a driving movement; a first sensing mass and a second sensing mass suspended above the substrate; first and second elastic supports, respectively coupling the first and second masses to the driving assembly and configured to enable the sensing masses to perform a movement of detection along a first direction of detection, in response to an external stress; a coupling assembly to mechanically connect the first sensing mass and the second sensing mass and to couple their vibration modes, the coupling assembly further comprising; a rigid element between the first and the second sensing masses having a point of constraint in an intermediate position between the first and second sensing masses; and first and second elastic connectors to connect respective ends of the rigid element to the first and second sensing masses, the first and second elastic connectors and the rigid element configured to present a first stiffness to a movement in phase-opposition, and a second stiffness, greater than the first stiffness, to a movement in phase of the first and second sensing masses along the first direction of detection; and a reading stagecoupled to the integrated MEMS structure. - View Dependent Claims (15)
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16. A method, comprising:
forming an integrated MEMS structure, the forming comprising; forming a driving assembly anchored to a substrate and configured to be actuated with a driving movement; forming a first sensing mass and a second sensing mass suspended above the substrate; forming first and second elastic supports, respectively to couple the first and second sensing masses to the driving assembly and configured to enable the sensing masses to perform a movement of detection along a first direction of detection, in response to an external stress; and forming a coupling assembly mechanically connecting the first sensing mass and the second sensing mass and to couple their vibration modes, forming the coupling assembly further comprising; forming a rigid element between the first and the second sensing masses having a point of constraint in an intermediate position between the first and second sensing masses; and forming first and second elastic connectors to connect respective ends of the rigid element to the first and second sensing masses, the first and second elastic connectors and the rigid element to present a first stiffness to a movement in phase-opposition, and a second stiffness, greater than the first stiffness, to a movement in phase of the first and second sensing masses along the first direction of detection. - View Dependent Claims (17, 18)
Specification