METHOD FOR FABRICATION OF TRANSPARENT GAS BARRIER FILM USING PLASMA SURFACE TREATMENT AND TRANSPARENT GAS BARRIER FILM FABRICATED THEREBY
First Claim
1. A method of fabricating a transparent gas barrier film with excellent gas barrier properties comprising:
- a) coating an organic/inorganic hybrid solution on the surface of a transparent plastic film to form an organic/inorganic hybrid layer; and
b) treating the surface of the organic/inorganic hybrid layer formed on the transparent plastic film with plasma of reactive gas to form an inorganic layer having an organic/inorganic gradient interface structure.
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Abstract
The present invention relates to a method of fabricating a transparent gas barrier film by using plasma surface treatment and a transparent gas barrier film fabricated according to such method which has an organic/inorganic gradient interface structure at the interface between an organic/inorganic hybrid layer and an inorganic layer. Since the method of the present invention is capable of fabricating a gas barrier film by plasma surface treatment instead of deposition under high vacuum, it can mass-produce a transparent gas barrier film with excellent gas barrier properties in an economical and simple manner. Further, since the transparent gas barrier film fabricated according to the method of the present invention shows excellent gas barrier properties and is free of crack formation and layer-peeling phenomenon, it can be effectively used in the manufacture of a variety of display panels.
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Citations
20 Claims
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1. A method of fabricating a transparent gas barrier film with excellent gas barrier properties comprising:
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a) coating an organic/inorganic hybrid solution on the surface of a transparent plastic film to form an organic/inorganic hybrid layer; and b) treating the surface of the organic/inorganic hybrid layer formed on the transparent plastic film with plasma of reactive gas to form an inorganic layer having an organic/inorganic gradient interface structure. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification