Smart Temperature Measuring Device
First Claim
1. A thermocouple assembly comprising:
- at least one thermocouple junction for measuring temperature; and
an electronic circuit on which calibration data and a unique identification number is stored, wherein said at least one thermocouple junction is operatively connected to said electronic circuit.
2 Assignments
0 Petitions
Accused Products
Abstract
A temperature measuring device having a smart chip, or electronic circuit, integrated therein is provided. The smart chip, or electronic circuit, includes at least a unique identification number or data specific to the particular temperature measuring device stored thereon. The electronic circuit further includes calibration data of the temperature measuring device stored thereon. A module controller of a temperature control system is configured to verify the unique identification number of the thermocouple assembly prior to allowing data to be transferred between the temperature measuring device and a temperature controller. A graphical user interface allows an operator to enter the unique identification number or data to verify the temperature measuring device and display an error message if the number or data entered is not equivalent, or does not match, the unique identification number or data stored on the electronic circuit.
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Citations
20 Claims
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1. A thermocouple assembly comprising:
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at least one thermocouple junction for measuring temperature; and an electronic circuit on which calibration data and a unique identification number is stored, wherein said at least one thermocouple junction is operatively connected to said electronic circuit. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A temperature control system comprising:
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at least one heating element; a temperature controller, wherein each of said at least one heating element is operatively connected to said temperature controller and said temperature controller controls output of said at least one heating element; and a temperature measuring device operatively connected to said temperature controller, said temperature measuring device having an integrated electronic circuit. - View Dependent Claims (8, 9, 10, 11, 12)
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13. A method for verifying a temperature measuring device for a semiconductor processing tool, said method comprising:
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providing a temperature measuring device having an electronic circuit integrated therein, wherein said electronic circuit includes at least a unique identification number or data saved thereon; providing module controller operatively connected to said temperature measuring device; providing a temperature controller operatively connected to said module controller and said temperature measuring device; and verifying said unique identification number or data saved on said temperature measuring device prior to a transfer of data between said temperature measuring device and said temperature controller. - View Dependent Claims (14, 15, 16, 17)
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18. A method for verifying a temperature measuring device for a semiconductor processing tool, said method comprising:
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providing a module controller operatively connected to a temperature controller; connecting a temperature measuring device to said module controller, wherein said module controller queries said temperature measuring device for a unique identification number stored on an electronic circuit integrated with said temperature measuring device; entering an identification number into a graphical user interface (GUI), said GUI operatively connected to said module controller; comparing said unique identification number stored on said electronic circuit of said temperature measuring device with said identification number entered into said GUI; allowing data transfer between said temperature measuring device and said temperature controller if said unique identification number stored on said electronic circuit of said temperature measuring device is equivalent to said identification number entered into said GUI; and preventing data transfer between said temperature measuring device and said temperature controller if said unique identification number stored on said electronic circuit of said temperature measuring device is not equivalent to said identification number entered into said GUI. - View Dependent Claims (19, 20)
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Specification