Pressure compensation unit for use in a pressure sensor
First Claim
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1. A pressure compensation unit for a pressure sensor, comprising:
- a housing having at least one continuous channel, wherein at least one opening is provided in a wall of the at least one continuous channel, and wherein the at least one opening is connected to a reference pressure chamber of the pressure sensor via at least one air passage in the housing; and
at least one gas-permeable and fluid-tight filter diaphragm, wherein the at least one opening provided in the wall of the at least one continuous channel is closed by the at least one gas-permeable and fluid-tight filter diaphragm.
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Abstract
A pressure compensation unit for use in a pressure sensor includes a housing which has at least one continuous channel, at least one opening being provided in a wall of the channel. The opening is connectable to a reference pressure chamber of the pressure sensor via at least one air passage in the housing. The opening is closed by at least one gas-permeable and preferably fluid-tight filter diaphragm.
9 Citations
10 Claims
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1. A pressure compensation unit for a pressure sensor, comprising:
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a housing having at least one continuous channel, wherein at least one opening is provided in a wall of the at least one continuous channel, and wherein the at least one opening is connected to a reference pressure chamber of the pressure sensor via at least one air passage in the housing; and at least one gas-permeable and fluid-tight filter diaphragm, wherein the at least one opening provided in the wall of the at least one continuous channel is closed by the at least one gas-permeable and fluid-tight filter diaphragm. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A pressure sensor for detecting a pressure in a measuring chamber, comprising:
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at least one sensor element connected to the measuring chamber; at least one reference pressure chamber connected to the sensor element and isolated from the measuring chamber; and a pressure compensation unit including; a housing having at least one continuous channel, wherein at least one opening is provided in a wall of the at least one continuous channel, and wherein the at least one opening is connected to the reference pressure chamber via at least one air passage in the housing; and at least one gas-permeable and fluid-tight filter diaphragm, wherein the at least one opening provided in the wall of the at least one continuous channel is closed by the at least one gas-permeable and fluid-tight filter diaphragm.
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Specification