LASER PROCESSING APPARATUS AND LASER PROCESSING METHOD
First Claim
1. An apparatus for laser processing comprising:
- a laser source for emitting a laser beam, wherein the laser beam includes an optical axis;
a first shift section including;
a first transparent member including a first incident face and a first output face that are parallel to each other, in which the laser beam, when being emitted, enters the first transparent member by being incident on the first incident face at an incident angle, passes through the first transparent member, and exits from the first output face; and
a first rotating mechanism that supports the first transparent member so that the laser beam passes through the first incident face and the first output face, wherein the first rotating mechanism rotates the first transparent member around a first rotational axis perpendicular to the optical axis to change the incident angle of the laser beam incident on the first incident face;
wherein the first shift section shifts the laser beam exiting from the first output face in a state parallel with the laser beam incident on the first incident face in a first direction;
a second shift section including;
a second transparent member including a second incident face and a second output face that are parallel to each other, wherein the laser beam exiting from the first shift section enters the second incident face by being incident on the second incident face at another incident angle; and
a second rotating mechanism that supports the second transparent member so that the laser beam passes through the second incident face with the laser beam exiting from the second output face, wherein the second rotating mechanism rotates the second transparent member around a second rotational axis perpendicular to the optical axis and the first rotational axis to change the another incident angle of the laser beam incident on the second incident face;
wherein the second shift section shifts the laser beam exiting from the second output face in a state parallel with the laser beam incident on the second incident face in a second direction perpendicular to the first direction; and
a light collector for collecting the laser beam emitted from the second shift section.
1 Assignment
0 Petitions
Accused Products
Abstract
A laser processing apparatus comprises a first shift mechanism including a first transparent member having a first incident face and a first output face that are parallel to each other; and a first motor that rotates the first transparent member around a first rotational axis. The first shift mechanism shifts the laser beam exiting from the first output face in a state parallel with the incident light on the first incident face in a first direction. The laser processing apparatus also comprises a second shift mechanism including a second transparent member including a second incident face and a second output face that are parallel to each other; and a second motor that rotates the second transparent member around the second rotational axis. The second rotating mechanism rotates the laser beam exiting from the second output face in a state parallel with the laser beam incident on the second incident face in a second direction perpendicular to the first direction. A light collecting lens collects the laser beam shifted with the second shift section to process a work. This configuration allows control of a taper angle of a hole formed by laser processing.
-
Citations
8 Claims
-
1. An apparatus for laser processing comprising:
-
a laser source for emitting a laser beam, wherein the laser beam includes an optical axis; a first shift section including; a first transparent member including a first incident face and a first output face that are parallel to each other, in which the laser beam, when being emitted, enters the first transparent member by being incident on the first incident face at an incident angle, passes through the first transparent member, and exits from the first output face; and a first rotating mechanism that supports the first transparent member so that the laser beam passes through the first incident face and the first output face, wherein the first rotating mechanism rotates the first transparent member around a first rotational axis perpendicular to the optical axis to change the incident angle of the laser beam incident on the first incident face; wherein the first shift section shifts the laser beam exiting from the first output face in a state parallel with the laser beam incident on the first incident face in a first direction; a second shift section including; a second transparent member including a second incident face and a second output face that are parallel to each other, wherein the laser beam exiting from the first shift section enters the second incident face by being incident on the second incident face at another incident angle; and a second rotating mechanism that supports the second transparent member so that the laser beam passes through the second incident face with the laser beam exiting from the second output face, wherein the second rotating mechanism rotates the second transparent member around a second rotational axis perpendicular to the optical axis and the first rotational axis to change the another incident angle of the laser beam incident on the second incident face; wherein the second shift section shifts the laser beam exiting from the second output face in a state parallel with the laser beam incident on the second incident face in a second direction perpendicular to the first direction; and a light collector for collecting the laser beam emitted from the second shift section. - View Dependent Claims (2, 3, 4, 5, 6)
-
-
7. A method for laser processing comprising:
-
emitting a laser beam from a laser source and passing the laser beam through a first transparent member, including a first incident face and a first output face that are parallel to each other by directing the laser beam to be incident on the first incident face with the laser beam exiting from the first output face in a state parallel with the laser beam incident on the first incident face and shifted in a first direction, wherein the laser beam includes an optical axis, wherein the first transparent member is rotated around a first rotational axis perpendicular to the optical axis; passing the laser beam through a second transparent member, including a second incident face and a second output face that are parallel to each other, by directing the laser beam exiting from the first output face to be incident on the second incident face with the laser beam exiting from the second output face in a state parallel with laser beam incident on the second incident face and shifted in a second direction perpendicular to the first direction, wherein the second transparent member is rotated around a second rotational axis perpendicular to the optical axis and the first rotational axis; and collecting the laser beam shifted in the second direction at a light collector to process an object. - View Dependent Claims (8)
-
Specification