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OPTICAL ELEMENT FOR REFLECTION OF UV RADIATION, METHOD FOR MANUFACTURING THE SAME AND PROJECTION EXPOSURE APPARATUS COMPRISING THE SAME

  • US 20100290021A1
  • Filed: 05/14/2010
  • Published: 11/18/2010
  • Est. Priority Date: 11/14/2007
  • Status: Active Grant
First Claim
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1. An optical element configured to reflect ultraviolet radiation at an operating wavelength (λ

  • 0) below 250 nm, comprising;

    a substrate,a reflective aluminum layer superimposed on the substrate, the reflective aluminum layer not being transparent to the ultraviolet radiation,wherein;

    the reflective aluminum layer is (111)-plane oriented, andthe reflective optical element has a reflectivity of more than 85% in a range of incident angles of at least 10°

    at the operating wavelength.

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