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METHOD AND APPARATUS FOR ESTIMATING FEATURES OF TARGET MATERIALS BY USING KINETIC CHANGE INFORMATION

  • US 20100292932A1
  • Filed: 01/21/2009
  • Published: 11/18/2010
  • Est. Priority Date: 01/22/2008
  • Status: Active Grant
First Claim
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1. A method of estimating feature values of a measurement target material using kinetic change information, comprising:

  • acquiring kinetic change information related to feature values of a measurement target material; and

    estimating the feature values of the measurement target material using both the kinetic change information and a previously determined correlation function,wherein the kinetic change information denotes a change in the feature values of the measurement target material over time.

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