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Mode-Matching Apparatus and Method for Micromachined Inertial Sensors

  • US 20100294039A1
  • Filed: 05/21/2009
  • Published: 11/25/2010
  • Est. Priority Date: 05/21/2009
  • Status: Active Grant
First Claim
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1. In an inertial sensor having a resonator and an accelerometer, the resonator including at least one shuttle characterized by a shuttle resonance mode, the accelerometer characterized by an accelerometer resonance mode, a method of matching the shuttle resonance mode and the accelerometer resonance mode, the method comprising:

  • providing a test signal to the inertial sensor at a frequency higher than a predetermined inertial sensor response frequency and lower than a predetermined accelerometer resonance mode frequency, the test signal inducing accelerometer signals when the shuttle resonance mode and the accelerometer resonance mode are not matched; and

    providing a feedback signal to the inertial sensor in response to such induced accelerometer signals to substantially nullify the induced accelerometer signals.

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