Mode-Matching Apparatus and Method for Micromachined Inertial Sensors
First Claim
1. In an inertial sensor having a resonator and an accelerometer, the resonator including at least one shuttle characterized by a shuttle resonance mode, the accelerometer characterized by an accelerometer resonance mode, a method of matching the shuttle resonance mode and the accelerometer resonance mode, the method comprising:
- providing a test signal to the inertial sensor at a frequency higher than a predetermined inertial sensor response frequency and lower than a predetermined accelerometer resonance mode frequency, the test signal inducing accelerometer signals when the shuttle resonance mode and the accelerometer resonance mode are not matched; and
providing a feedback signal to the inertial sensor in response to such induced accelerometer signals to substantially nullify the induced accelerometer signals.
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Abstract
A mode matching servo for an inertial sensor having a resonator and an accelerometer provides a test signal at a frequency higher than a predetermined inertial sensor response frequency and lower than an accelerometer resonance mode frequency so as to induce acceleration signals from the accelerometer substantially at the test signal frequency when the modes are not matched. A feedback signal is provided in response to such induced signals to substantially nullify the signals.
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Citations
29 Claims
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1. In an inertial sensor having a resonator and an accelerometer, the resonator including at least one shuttle characterized by a shuttle resonance mode, the accelerometer characterized by an accelerometer resonance mode, a method of matching the shuttle resonance mode and the accelerometer resonance mode, the method comprising:
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providing a test signal to the inertial sensor at a frequency higher than a predetermined inertial sensor response frequency and lower than a predetermined accelerometer resonance mode frequency, the test signal inducing accelerometer signals when the shuttle resonance mode and the accelerometer resonance mode are not matched; and providing a feedback signal to the inertial sensor in response to such induced accelerometer signals to substantially nullify the induced accelerometer signals. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. An inertial sensor comprising:
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an accelerometer characterized by an accelerometer resonance mode; a resonator including at least one shuttle characterized by a shuttle resonance mode; a test signal generator configured to provide a test signal at a frequency higher than a predetermined inertial sensor response frequency and lower than a predetermined accelerometer resonance mode frequency, the test signal inducing accelerometer signals when the shuttle resonance mode and the accelerometer resonance mode are not matched; and a mode matching servo for matching the shuttle resonance mode and the accelerometer resonance mode, the servo configured to provide a feedback signal to the inertial sensor in response to such induced accelerometer signals to substantially nullify the induced accelerometer signals. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24)
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25. A controller for matching a shuttle resonance mode and an accelerometer resonance mode for an inertial sensor having a resonator and an accelerometer, the controller comprising:
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a test signal generator configured to provide a test signal at a frequency higher than a predetermined inertial sensor response frequency and lower than a predetermined accelerometer resonance mode frequency, the test signal inducing accelerometer signals when the shuttle resonance mode and the accelerometer resonance mode are not matched; and a mode matching servo configured to provide a feedback signal to the inertial sensor in response to such induced accelerometer signals to substantially nullify the induced accelerometer signals.
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26. An inertial sensor comprising:
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a substrate having a plurality of electrode arrangements, each electrode arrangement including an acceleration sensor electrode and a pair of quadrature electrodes on opposite sides of the acceleration sensor electrode; and a resonator disposed above the substrate and having at least one shuttle including a plurality of plates, each plate completely overlaying a corresponding acceleration sensor electrode and partially overlaying the pair of quadrature electrodes on opposite sides of the acceleration sensor electrode, such that capacitive coupling between the plate and each of the quadrature electrodes is dependent upon the rotational position of the at least one shuttle while capacitive coupling between the plate and the acceleration sensor electrodes is substantially independent of the rotational position of the at least one shuttle. - View Dependent Claims (27)
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28. A method of inducing acceleration signals for matching a shuttle resonance mode and an accelerometer resonance mode in an inertial sensor having a resonator and an accelerometer, the resonator including at least one shuttle, the method comprising:
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resonating the at least one shuttle in a device plane at a shuttle resonance mode frequency; and modulating the motion of the at least one resonator shuttle to induce the accelerometer signals. - View Dependent Claims (29)
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Specification