Cleaning Method
1 Assignment
0 Petitions
Accused Products
Abstract
A cleaning method using a cleaning apparatus having an adhesive sheet, a conductive sheet in contact with a base material of the adhesive sheet, and a pressing member for pressing the conductive sheet onto the adhesive sheet. The pressing member includes a voltage applier, and a pressing force controller which presses the adhesive sheet onto a curved surface of a portion to be cleaned of a vacuum processing apparatus from above the conductive sheet. The method includes pressing the pressing member by a pressing force controlled via the pressing force controller to press the conductive sheet and the adhesive sheet to adhere an adhesive surface of the adhesive sheet to the curved surface of the portion to be cleaned, and applying a voltage to the conductive sheet or applying a voltage having a temporally changed polarity.
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Citations
7 Claims
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1. (canceled)
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2. (canceled)
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3. (canceled)
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4. (canceled)
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5. (canceled)
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6. A cleaning method using a cleaning apparatus comprising an adhesive sheet including a base material and an adhesive surface, a conductive sheet having flexibility in contact with the base material of the adhesive sheet, and a pressing member for pressing the conductive sheet onto the adhesive sheet, the pressing member further comprising a voltage applying mechanism for applying positive or negative voltage to the conductive sheet, and a pressing force controlling mechanism for pressing the adhesive sheet onto a curved surface of a portion to be cleaned of a vacuum processing apparatus from above the conductive sheet;
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the method comprising a first step of pressing the pressing member by a pressing force controlled via the pressing force controlling mechanism so as to press the conductive sheet and the adhesive sheet in order to closely adhere the adhesive surface of the adhesive sheet to the curved surface of the portion to be cleaned of the vacuum processing apparatus; and a second step of applying positive or negative DC voltage to the conductive sheet or applying voltage having temporally changed polarity from the voltage applying mechanism; wherein the first step removes particles attached to the curved surface of the portion to be cleaned of the vacuum processing apparatus, while the second step generates electrostatic attraction force to attract and remove particles attached to the curved surface of the portion to be cleaned of the vacuum processing apparatus. - View Dependent Claims (7)
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Specification