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Automated calibration methodology for VUV metrology system

  • US 20100294922A1
  • Filed: 05/22/2009
  • Published: 11/25/2010
  • Est. Priority Date: 05/22/2009
  • Status: Active Grant
First Claim
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1. A method of evaluating an optical metrology tool, comprising:

  • utilizing an optical tool characterization pad for use in assisting in the evaluation of an optical metrology tool;

    providing multiple characterization sites of a similar characterization structure upon the characterization pad; and

    designating at least some of the characterization sites as either acceptable for use or not, wherein based upon the designation, after the designation at least some of the characterization sites are not utilized for evaluation of the optical metrology tool.

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