FIELD-EFFECT TRANSISTOR, METHOD FOR MANUFACTURING FIELD-EFFECT TRANSISTOR, DISPLAY DEVICE USING FIELD-EFFECT TRANSISTOR, AND SEMICONDUCTOR DEVICE
First Claim
Patent Images
1. A field effect transistor which comprises an oxide film as a semiconductor layer,the oxide film has a channel part, a source part and a drain part, andthe channel part, the source part and the drain part have substantially the same composition except oxygen and an inert gas.
1 Assignment
0 Petitions
Accused Products
Abstract
A field effect transistor which includes an oxide film as a semiconductor layer, the oxide film has a channel part, a source part and a drain part, and the channel part, the source part and the drain part have substantially the same composition except oxygen and an inert gas.
-
Citations
28 Claims
-
1. A field effect transistor which comprises an oxide film as a semiconductor layer,
the oxide film has a channel part, a source part and a drain part, and the channel part, the source part and the drain part have substantially the same composition except oxygen and an inert gas.
-
9. A method for producing a field effect transistor comprising the steps of:
-
forming an oxide film and lowering the resistance of part of the oxide film to form a source part and a drain part, wherein the oxide film has a channel part and the source part and the drain part. - View Dependent Claims (10, 11)
-
-
12. A method for producing a field effect transistor comprising the steps of:
-
forming an oxide film and increasing the resistance of part of the oxide film to form a channel part, wherein the oxide film has the channel part and a source part and a drain part. - View Dependent Claims (13)
-
-
14. A method for producing a field effect transistor comprising the steps of:
-
forming an oxide film, coating the oxide film by an insulating film, and forming a gate electrode on the insulating film and heating the gate electrode to increase the resistance of part of the oxide film, thereby to form a channel part, wherein the oxide film has the channel part and a source part and a drain part.
-
-
15. A semiconductor device wherein an oxide semiconductor, which is a non-degenerate semiconductor, is connected to a conductor with an oxide semiconductor, which is a degenerate semiconductor, therebetween.
-
16. A field effect transistor comprising a channel part which comprises an oxide semiconductor and a source part and a drain part which each comprises an oxide semiconductor,
the channel part being a non-degenerate semiconductor and at least one of the source part and the drain part being a degenerate semiconductor, and the channel part being connected to a source electrode and a drain electrode with the source part and the drain part therebetween.
Specification