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ISOLATED ACTIVE TEMPERATURE REGULATOR FOR VACUUM PACKAGING OF A DISC RESONATOR GYROSCOPE

  • US 20100300201A1
  • Filed: 05/27/2009
  • Published: 12/02/2010
  • Est. Priority Date: 05/27/2009
  • Status: Active Grant
First Claim
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1. An apparatus for isolating a MEMS die, comprising:

  • a top layer comprising a resistive heater for regulating temperature of the MEMS die; and

    a bottom layer comprising a bottom layer central region, one or more bottom layer periphery regions and a plurality of substantially radial bottom layer isolation beams, each extending from the bottom layer central region to one of the one or more bottom layer periphery regions;

    wherein an upper surface of the top layer is bonded to the MEMS die and a lower surface of the top layer is bonded to the bottom layer and a temperature sensor is used with the resistive heater to regulate the temperature of the MEMS die.

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