MAGNETIC PARTICLE TRAPPER FOR A DISK SPUTTERING SYSTEM

• US 20100300875A1
• Filed: 05/28/2009
• Published: 12/02/2010
• Est. Priority Date: 05/28/2009
• Status: Active Grant

• Current Assignee: JP Morgan Chase Bank, N.A. (JP Morgan Chase & Co)
• Original Assignee: WD Media Incorporated (Western Digital Corporation)
• Inventors: NIPPA, KINYA, CHEN, JINLIANG
• Granted Patent: US 8,101,054 B2
• Time in Patent Office: Days
• US Class Current: 204/298.02
• CPC Class Codes: C23C 14/50 Substrate holders
• CPC Class Codes: C23C 14/564 Means for minimising impurities in the coating chamber such as dust, moisture, residual gases
• CPC Class Codes: C23C 14/568 Transferring the substrates through a series of coating stations C23C14/562 takes precedence

Abstract

A magnetic particle trapper for use in a sputtering system includes a roller cover plate having a plurality of openings arranged and dimensioned to accommodate a plurality of rollers associated with a mechanical transport mechanism of the sputtering system, and a plurality of magnets to trap magnetic particles, the plurality of magnets being attached to the roller cover plate in locations proximate to the plurality of openings.

Claims

1. A magnetic particle trapper for use in a sputtering system, comprising:

a roller cover plate having a plurality of openings arranged and dimensioned to accommodate a plurality of rollers associated with a mechanical transport mechanism of the sputtering system; and

a plurality of magnets to trap magnetic particles, the plurality of magnets being attached to the roller cover plate in locations proximate to the plurality of openings.

2. The magnetic particle trapper of claim 1, further comprising a plurality of roller shields attached to the roller cover plate in locations adjacent to the plurality of openings, each roller shield to cover at least one of the plurality of magnets.

3. The magnetic particle trapper of claim 1, wherein the roller cover plate includes a plurality of vertical walls to form the plurality of openings to accommodate the plurality of rollers.

4. The magnetic particle trapper of claim 3, wherein the plurality of magnets are attached to the plurality of vertical walls.

5. The magnetic particle trapper of claim 3, wherein the plurality of roller shields are attached to the plurality of vertical walls in locations adjacent to the plurality of openings, each roller shield to cover at least one of the plurality of magnets.

6. The magnetic particle trapper of claim 1, wherein the plurality of openings includes a plurality of semi-circular openings.

7. The magnetic particle trapper of claim 1, wherein the plurality of openings includes a plurality of semi-oval openings.

8. The magnetic particle trapper of claim 1, wherein the magnetic particle trapper includes a bottom shield attached to the roller cover plate.

9. The magnetic particle trapper of claim 7, wherein the bottom shield has a plurality of openings to accommodate at lease one of the plurality of magnets.

10. The magnetic particle trapper of claim 1, wherein the plurality of magnets includes permanent magnets made from magnetic alloys including at least one metal selected from the group consisting of Neodymium, Iron, Boron, Samarium, and Cobalt.

11. The magnetic particle trapper of claim 1, wherein the roller cover plate is removeably mounted to the mechanical transport mechanism having the plurality of rollers.

12. The magnetic particle trapper of claim 1, wherein the roller cover plate is shaped like an inverted letter “

L”

, the length is greater than the height, and the height is greater the width.

13. The magnetic particle trapper of claim 12, wherein the roller cover plate has seven openings to accommodate seven rollers associated with the mechanical transport mechanism of the sputtering system.