MEMS MICROMIRROR AND MICROMIRROR ARRAY
First Claim
1. A micro-electro-mechanical-system (MEMS) micromirror array, comprising:
- an array of micromirrors on a support structure, each micromirror being pivotally attached to the support structure by a resilient structure, the resilient structure defining a pivot axis;
an array of electrostatic actuators for pivotally driving the array of micromirrors about the pivot axis, each electrostatic actuator comprising a first part carried by the support structure, and a second part carried by the corresponding micromirror; and
an electrostatic sink mounted to the support structure that shields at least one micromirror from spurious electrostatic actuation.
4 Assignments
0 Petitions
Accused Products
Abstract
A micro-electro-mechanical-system (MEMS) micromirror array has an array of micromirrors on a support structure. Each micromirror is pivotally attached to the support structure by a resilient structure. The resilient structure defines a pivot axis. There is an array of electrostatic actuators for pivotally driving the array of micromirrors about the pivot axis. Each electrostatic actuator comprises a first part carried by the support structure, and a second part carried by the corresponding micromirror. An electrostatic sink is mounted to the support structure that shields at least one micromirror from spurious electrostatic actuation.
-
Citations
29 Claims
-
1. A micro-electro-mechanical-system (MEMS) micromirror array, comprising:
-
an array of micromirrors on a support structure, each micromirror being pivotally attached to the support structure by a resilient structure, the resilient structure defining a pivot axis; an array of electrostatic actuators for pivotally driving the array of micromirrors about the pivot axis, each electrostatic actuator comprising a first part carried by the support structure, and a second part carried by the corresponding micromirror; and an electrostatic sink mounted to the support structure that shields at least one micromirror from spurious electrostatic actuation. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
-
-
21. A MEMS micromirror structure, comprising:
-
a micromirror mounted on a support structure by a resilient structure; an electrostatic actuator for moving the micromirror relative to the support structure, the electrostatic actuator comprising a first part carried by the support structure, and a second part carried by the corresponding micromirror; a latch mounted to the support structure by a movable portion that moves in response to an applied voltage between a latching position and a release position as the applied voltage is varied, wherein, in the latching position, the latch secures the micromirror in a desired position. - View Dependent Claims (22, 23)
-
-
24. A MEMS micromirror structure, comprising:
-
a micromirror mounted on a support structure by a resilient structure; an electrostatic actuator for pivotally driving the micromirror, the electrostatic actuator comprising a first part carried by the support structure, and a second part carried by the corresponding micromirror; the resilient structure comprising a first portion and a second portion that is symmetrical to the first portion, each of the first portion and the second portion comprising an I beam connected to a composite structure. - View Dependent Claims (25)
-
-
26. A MEMS micromirror, comprising:
-
a micromirror mounted on a support structure by a resilient structure, the resilient structure permitting movement along an axis that is perpendicular to the support structure and resisting movement in any direction perpendicular to the axis; an electrostatic combdrive actuator having a first part mounted on the support structure, and a second part mounted on the micromirror, the first part and the second part providing an actuating force to the micromirror to move the micromirror along the axis. - View Dependent Claims (27, 28, 29)
-
Specification