Micromirror Array Assembly with In-Array Pillars
0 Assignments
0 Petitions
Accused Products
Abstract
The present invention provides a microstructure device comprising multiple substrates with the components of the device formed on the substrates. In order to maintain uniformity of the gap between the substrates, a plurality of pillars is provided and distributed in the gap so as to prevent decrease of the gap size. The increase of the gap size can be prevented by bonding the pillars to the components of the microstructure. Alternatively, the increase of the gap size can be prevented by maintaining the pressure inside the gap below the pressure under which the microstructure will be in operation. Electrical contact of the substrates on which the micromirrors and electrodes are formed can be made through many ways, such as electrical contact areas, electrical contact pads and electrical contact springs.
-
Citations
98 Claims
-
1-32. -32. (canceled)
-
33. A spatial light modulator for use in a projection system, comprising:
-
a micromirror array device, comprising; a first substrate having thereon an array of micromirrors; a second substrate; and a plurality of pillars disposed between the substrates such that the first substrate is connected to the second substrate via the micromirror and the pillar for maintaining a uniform gap between the substrates. - View Dependent Claims (34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48, 49, 50)
-
-
51. A micromirror device, comprising:
-
a first substrate; a post on the substrate; a mirror plate attached to a hinge that is held by the post on the substrate such that the mirror plate rotates on the substrate; a pillar on the mirror plate and in connection with the post; and a second substrate, wherein the second substrate is disposed on the pillar and connected to the pillar such that the distance between the first and second substrate is maintained at a substantially constant value. - View Dependent Claims (52, 53, 54, 55, 56, 57, 58, 59, 60, 61)
-
-
62. A method of making a spatial light modulator, the method comprising:
-
forming an array of micromirrors on first substrate; providing a second substrate; forming a plurality of pillars on the second substrate; aligning each pillar with one of the micromirrors; and bonding the substrates. - View Dependent Claims (63, 64, 65)
-
-
66-70. -70. (canceled)
-
71. A spatial light modulator, comprising:
-
an array of micromirrors on a first substrate; a second substrate; a first sealing material that hermetically bonds the first and second substrates; and a second sealing material other than the first seal material contracting the first and second substrate for enhancing the hermetic seal with the first sealing material. - View Dependent Claims (72, 73, 74, 75, 76, 77, 78)
-
-
79. A microelectromechanical device, comprising:
-
a first and second substrate bonded together; an array of MEMS elements formed on the first substrate and disposed between the substrates; and a plurality of pillars disposed between the second substrate and the MEMS elements. - View Dependent Claims (80, 81, 82, 83, 84, 85, 86, 87)
-
-
88. A method of forming a spatial light modulator for use in a display system, the method comprising:
-
forming a plurality of micromirrors on a first substrate, wherein each micromirror has a fixed portion and a movable portion; providing a second substrate; and forming a pillar on the fixed portion of the micromirror and/or on the second substrate. - View Dependent Claims (89, 90, 91, 92, 93, 94, 95, 96, 97, 98)
-
Specification