VACUUM PUMP

• US 20100303640A1
• Filed: 08/15/2006
• Published: 12/02/2010
• Est. Priority Date: 09/01/2005
• Status: Abandoned Application

• Current Assignee: Oerlikon Leybold Vacuum GmbH (Atlas Copco AB)
• Original Assignee: Oerlikon Leybold Vacuum GmbH (Atlas Copco AB)
• Inventors: Longerich, Thomas, Greven, Alois
• Application Number:
  US11/991,222
• Publication Number:
  US 20100303640A1
• Time in Patent Office: Days
• US Class Current: 417/63
• CPC Class Codes: F04D 19/042 Turbomolecular vacuum pumps
• CPC Class Codes: F04D 27/001 Testing thereof; Determination or simulation of flow characteristics; Stall or surge detection, e.g. condition monitoring

Abstract

A vacuum pump (10) has a pump rotor (14) and a pump stator (12). The pump rotor (14) has an electrical measuring transducer (44), for example a temperature sensor. A transmitting antenna (40), which is connected with the measuring transducer (44), is provided on the pump rotor (14). A receiving antenna (30), which receives measurement values of the measuring transducer (44) from the transmitting antenna (40), is provided on the pump stator (12) so as to be situated opposite the transmitting antenna (40). In this way, accurate measurement values can be transmitted from the pump rotor (14) to the pump stator (12).

Claims

1. A vacuum pump comprising a pump rotor;

a pump stator;

the pump rotor including an electric measuring transducer,

a transmitting antenna at the pump rotor, which transmitting antenna is connected to the measuring transducer; and

a receiving antenna at the pump stator, which receiving antenna receives measured values measured by the measuring transducer from the transmitting antenna.

2. The vacuum pump of claim 1, wherein a respective energy transmission coil is provided at the pump stator and the pump rotor, the energy transmission coil on the side of the pump rotor providing electric energy for the measuring transducer the electric energy being transmitted wirelessly from the pump stator to the pump rotor to supply electric energy to the measuring transducer.

3. The vacuum pump of claim 1, wherein at least one of the transmitting and receiving antennas is annular in shape.

4. The vacuum pump of claim 1, further including:

a transponder at the pump rotor, which transponder is connected to the measuring transducer and the transmitting antenna, and which transponder, upon a request, causes a transmission of a measured value from the measuring transducer via the transmitting antenna.

5. The vacuum pump of claim 1, wherein the measuring transducer is a temperature sensor.

6. The vacuum pump of claim 1, wherein the vacuum pump is a turbomolecular pump.

7. A turbomolecular vacuum pump comprising:

a stator;

a rotor rotatably mounted in the stator;

a sensor mounted on the rotor to measure a characteristic of the rotor;

a rotor side coil mounted on the rotor for rotation therewith and connected with the sensor;

a stator side coil mounted on the stator adjacent the rotor side coil, the stator and rotor side coils electrically coupling to communication at least one of electric energy and electrical signals indicative of the measured rotor characteristic therebetween;

a motor mounted at least partially to the stator to rotate the rotor relative to the stator; and

,

a control module connected with the stator coil to evaluate the electrical signals.

8. The vacuum pump of claim 7, wherein the control module is connected with the motor to control the motor in accordance with the measured rotor characteristic.

9. The vacuum pump of claim 7, wherein the sensor includes at least one of a temperature sensor, a strain sensor, an acceleration sensor, and a vibration sensor.

10. The vacuum pump of claim 7, further including:

a transponder mounted on the rotor and connected with the rotor coil and the senstor to control and power the sensor and to communicate the electrical signals indicative of the measured rotor characteristic to the rotor coil.