Thin Film Interference Filter and Bootstrap Method for Interference Filter Thin Film Deposition Process Control
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Abstract
A thin film interference filter system includes a plurality of stacked films having a determined reflectance; a model monitor curve; and a topmost layer configured to exhibit a wavelength corresponding to one of the determined reflectance or the modeled monitor curve. The topmost layer is placed on the plurality of stacked films and can he a low-index film such as silica or a high index film such as niobia.
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23 Claims
- 1. (canceled)
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5. (canceled)
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17. (canceled)
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20-22. -22. (canceled)
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23. A method for forming a thin film interference filter comprising:
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measuring the reflectance of a stack of a plurality of films; modeling a monitor curve at a modeled monitor wavelength for a topmost layer to be deposited on the stack of the plurality of films; depositing the topmost layer on the stack of the plurality of films; and recording a plurality of monitor curves during the deposition, each monitor curve being recorded for a different monitor wavelength of the topmost layer; wherein the topmost layer exhibits a wavelength that is determined according to the characteristics of either the modeled monitor curve or one of the recorded monitor curves. - View Dependent Claims (2, 3, 4, 6, 7, 15, 16, 18, 19)
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Specification