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COMBINED MEMS ACCELEROMETER AND GYROSCOPE

  • US 20100307241A1
  • Filed: 10/20/2008
  • Published: 12/09/2010
  • Est. Priority Date: 10/18/2007
  • Status: Active Grant
First Claim
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1. A combined accelerometer and gyroscope unit comprising:

  • a proof mass;

    primary actuating means operable to actuate the proof mass along a primary axis;

    secondary actuating means operable to actuate the proof mass along a secondary axis;

    secondary sensing means operable to sense the position of the proof mass along the secondary axis; and

    primary sensing means operable to sense the position of the proof mass along the primary axis wherein Σ

    Δ

    force-feedback loops are set up for both the secondary axis and the primary axis.

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