MICROELECTROMECHANICAL GYROSCOPE WITH POSITION CONTROL DRIVING AND METHOD FOR CONTROLLING A MICROELECTROMECHANICAL GYROSCOPE
First Claim
1. A microelectromechanical gyroscope comprising:
- a microstructure including a fixed structure, a driving mass, movable with respect to the fixed structure with a first degree of freedom according to a driving axis, and a first sensing mass mechanically coupled to the driving mass so as to be drawn in motion according to the driving axis and movable with respect to the driving mass with a second degree of freedom according to a first sensing axis in response to rotations of the microstructure; and
a sensing device forming a microelectromechanical loop with the microstructure, the microelectromechanical loop being configured to keep the driving mass in oscillation according to the driving axis at a driving frequency;
wherein the sensing device comprises;
a discrete-time sensing interface coupled to the microstructure and configured to sense a position of the driving mass with respect to the driving axis; and
control means for controlling an oscillation amplitude of the microelectromechanical loop based on the position of the driving mass detected by the sensing interface.
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Accused Products
Abstract
A MEMS gyroscope includes: a microstructure having a fixed structure, a driving mass, movable with respect to the fixed structure according to a driving axis, and a sensing mass, mechanically coupled to the driving mass so as to be drawn in motion according to the driving axis and movable with respect to the driving mass according to a sensing axis, in response to rotations of the microstructure; and a driving device, for keeping the driving mass in oscillation with a driving frequency. The driving device includes a discrete-time sensing interface, for detecting a position of the driving mass with respect to the driving axis and a control stage for controlling the driving frequency on the basis of the position of the driving mass.
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Citations
35 Claims
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1. A microelectromechanical gyroscope comprising:
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a microstructure including a fixed structure, a driving mass, movable with respect to the fixed structure with a first degree of freedom according to a driving axis, and a first sensing mass mechanically coupled to the driving mass so as to be drawn in motion according to the driving axis and movable with respect to the driving mass with a second degree of freedom according to a first sensing axis in response to rotations of the microstructure; and a sensing device forming a microelectromechanical loop with the microstructure, the microelectromechanical loop being configured to keep the driving mass in oscillation according to the driving axis at a driving frequency;
wherein the sensing device comprises;a discrete-time sensing interface coupled to the microstructure and configured to sense a position of the driving mass with respect to the driving axis; and control means for controlling an oscillation amplitude of the microelectromechanical loop based on the position of the driving mass detected by the sensing interface. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. A method, comprising:
controlling a microelectromechanical gyroscope provided with a microstructure that includes a fixed structure, a driving mass, movable with respect to the fixed structure with a first degree of freedom according to a driving axis, and a sensing mass mechanically coupled to the driving mass so as to be drawn in motion according to the driving axis and movable with respect to the driving mass with a second degree of freedom according to a sensing axis, in response to rotations of the microstructure, the controlling including; keeping the driving mass in oscillation according to the driving axis at a driving frequency; discrete-time sensing a position of the driving mass with respect to the driving axis; and controlling an oscillation amplitude of the microstructure based on the sensed position of the driving mass. - View Dependent Claims (16, 17, 18)
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19. A system comprising:
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a control unit; and a microelectromechanical gyroscope coupled to the control unit and configured to be controlled by the control unit, the gyroscope including; a microstructure including a fixed structure, a driving mass, movable with respect to the fixed structure with a first degree of freedom according to a driving axis, and a first sensing mass mechanically coupled to the driving mass so as to be drawn in motion according to the driving axis and movable with respect to the driving mass with a second degree of freedom according to a first sensing axis in response to rotations of the microstructure; and a sensing device forming a microelectromechanical loop with the microstructure, the microelectromechanical loop being configured to keep the driving mass in oscillation according to the driving axis at a driving frequency;
wherein the sensing device comprises;a discrete-time sensing interface coupled to the microstructure and configured to sense a position of the driving mass with respect to the driving axis; and control means for controlling an oscillation amplitude of the microelectromechanical loop based on the position of the driving mass detected by the sensing interface. - View Dependent Claims (20, 21, 22, 23, 24, 25, 26)
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27. A sensing device for a microstructure that includes a fixed structure, a driving mass, movable with respect to the fixed structure with a first degree of freedom according to a driving axis, and a sensing mass mechanically coupled to the driving mass so as to be drawn in motion according to the driving axis and movable with respect to the driving mass with a second degree of freedom according to a sensing axis in response to rotations of the microstructure, the sensing device comprising:
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a discrete-time sensing interface configured to sense a position of the driving mass with respect to the driving axis; and a driving amplifier coupled to the sensing interface and configured to control an oscillation amplitude of the driving mass based on the position of the driving mass detected by the sensing interface. - View Dependent Claims (28, 29, 30, 31, 32, 33, 34, 35)
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Specification