MEMS-Sensor
First Claim
Patent Images
1. MEMS sensor with a substrate (8) and a sensor element (3), that—
- relative to the substrate (8)—
moves as a reaction to an influence to be registered on the sensor (1), in which case the movement of the sensor element (3) is primarily an oscillating turn around a sensor axis that runs largely parallel to the substrate (8) and the sensor (1) has at least one anchor (2) arranged on the substrate (8) in order to hold the sensor element (3) onto the substrate (8) and a connecting element (4) is intended for arranging the sensor element (3) on the anchor (2), in which case the connecting element (4) has a meshwork (9) made of beams (10).
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Accused Products
Abstract
A MEMS sensor is provided with a substrate and a sensor element. The sensor element moves in response to an influence registered by the sensor primarily in an oscillating turn around a sensor axis that is parallel to the substrate. The sensor has an anchor arranged on the substrate in order to hold the sensor element onto the substrate. A connecting element arranges the sensor element on the anchor.
12 Citations
2 Claims
-
1. MEMS sensor with a substrate (8) and a sensor element (3), that—
- relative to the substrate (8)—
moves as a reaction to an influence to be registered on the sensor (1), in which case the movement of the sensor element (3) is primarily an oscillating turn around a sensor axis that runs largely parallel to the substrate (8) and the sensor (1) has at least one anchor (2) arranged on the substrate (8) in order to hold the sensor element (3) onto the substrate (8) and a connecting element (4) is intended for arranging the sensor element (3) on the anchor (2), in which case the connecting element (4) has a meshwork (9) made of beams (10).
- relative to the substrate (8)—
-
2-11. -11. (canceled)
Specification