×

MEMS-Sensor

  • US 20100307244A1
  • Filed: 06/03/2010
  • Published: 12/09/2010
  • Est. Priority Date: 06/03/2009
  • Status: Active Grant
First Claim
Patent Images

1. MEMS sensor with a substrate (8) and a sensor element (3), that—

  • relative to the substrate (8)—

    moves as a reaction to an influence to be registered on the sensor (1), in which case the movement of the sensor element (3) is primarily an oscillating turn around a sensor axis that runs largely parallel to the substrate (8) and the sensor (1) has at least one anchor (2) arranged on the substrate (8) in order to hold the sensor element (3) onto the substrate (8) and a connecting element (4) is intended for arranging the sensor element (3) on the anchor (2), in which case the connecting element (4) has a meshwork (9) made of beams (10).

View all claims
  • 3 Assignments
Timeline View
Assignment View
    ×
    ×