Microscopic Total Reflection Measuring Apparatus

• US 20100309455A1
• Filed: 04/20/2010
• Published: 12/09/2010
• Est. Priority Date: 06/04/2009
• Status: Active Grant

• Current Assignee: Jasco Corporation
• Original Assignee: Jasco Corporation
• Inventors: Sugiyama, Hiroshi, Sera, Takayuki, Soga, Noriaki, Koshoubu, Jun
• Granted Patent: US 8,531,674 B2
• Time in Patent Office: Days
• US Class Current: 356/51
• CPC Class Codes: G01N 21/3563 for analysing solids; Preparation of samples therefor
• CPC Class Codes: G01N 21/55 Specular reflectivity
• CPC Class Codes: G01N 21/8806 Specially adapted optical and illumination features
• CPC Class Codes: G02B 17/0808 on-axis systems with at least one of the mirrors having a central aperture
• CPC Class Codes: G02B 21/0016 Technical microscopes, e.g. for inspection or measuring in industrial production processes

Abstract

An object of the present invention is to provide a total reflection measuring apparatus which, while visually observing a specific minute area of a measurement object, is capable of efficiently obtaining optical data on the basis of the total reflection measurement. A microscopic total reflection measuring apparatus of the present invention comprises a Cassegrain mirror 12 having a Cassegrain primary mirror 16 and a Cassegrain secondary mirror 18, which condenses an incident light beam 30 on a measurement object 20 by making an incident light beam successively reflected by the secondary mirror 18 and the primary mirror 16, and which obtains a reflected light beam 32 from the measurement object 20 by making the reflected light beam 32 successively reflected by the primary mirror 16 and the secondary mirror 18. And, a total reflection prism 14 is arranged below the Cassegrain secondary mirror 18. And the incident light beam includes a visible light beam for visual observation and a measurement light beam for acquisition of analysis information, and present invention comprises a visible light filter which separates at least one of the incident light beam to the total reflection prism and the reflected light beam from the total reflection prism 14 into a total reflection area B and a normal reflection area A, and which removes, from the one of the incident light beam and the reflected light beam, the visible light beam in the total reflection area B.

Claims

1. A microscopic total reflection measuring apparatus, comprising:

a Cassegrain mirror having a Cassegrain primary mirror and a Cassegrain secondary mirror,

a total reflection prism which is arranged below the Cassegrain secondary mirror, and

a visible light filter,

wherein the Cassegrain mirror condenses an incident light beam on a measurement object by making an incident light beam successively reflected by the secondary mirror and the primary mirror, and obtains a reflected light beam from the measurement object by making the reflected light beam successively reflected by the primary mirror and the secondary mirror,

wherein the incident light beam includes a visible light beam for visual observation and a measurement light beam for acquisition of analysis information, and

wherein the visible light filter separates at least one of the incident light beam to the total reflection prism and the reflected light beam from the total reflection prism into a light directed to a total reflection area and a light directed to a normal reflection area, and removes, from the one of the incident light beam and the reflected light beam, the visible light beam in the total reflection area.

2. The microscopic total reflection measuring apparatus according to claim 1, wherein the filter is stuck to the total reflection prism.

3. The microscopic total reflection measuring apparatus according to claim 2, wherein the total reflection prism is hemispherical and the filter is formed concentrically with respect to the total reflection prism.

4. The microscopic total reflection measuring apparatus according to any of claim 1 to claim 3, wherein the measurement light beam for acquisition of analysis information is an infrared interference light beam.