ELECTRONIC DEVICE HANDLING APPARATUS AND ELECTRONIC DEVICE POSITION DETECTION METHOD

• US 20100310151A1
• Filed: 12/22/2008
• Published: 12/09/2010
• Est. Priority Date: 01/29/2008
• Status: Abandoned Application

• Current Assignee: Advantest Corporation
• Original Assignee: Advantest Corporation
• Inventors: Kikuchi, Aritomo, Koike, Tatsumi
• Application Number:
  US12/864,742
• Publication Number:
  US 20100310151A1
• Time in Patent Office: Days
• US Class Current: 382/149
• CPC Class Codes: G01R 31/2891 related to sensing or controlling of force, position, temperature G01R31/2874 takes precedence; sensing of force G01L; sensing of position G01B, G01D; sensing of temperature G01K; controlling in general G05
• CPC Class Codes: G01R 31/2893 Handling, conveying or loading, e.g. belts, boats, vacuum fingers G01R31/2867 takes precedence; handling semiconductor devices or wafers during manufacture or treatment H01L21/67

Abstract

An electronic device handling apparatus, wherein an image of terminals of an electronic device to be tested having the terminals at its end edge portions held by a conveyor device is taken, edges of terminals arranged in the X-axis direction are extracted from data of an taken image and binarization processing is performed on the data, while edges of terminals arranged in the Y-axis direction are extracted from data of the taken image and binarization processing is performed on the data, so that positions of edges of respective terminals are located from the obtained two binary images. Then, a positional deviation amount of the electronic device is calculated by comparing with reference positional information of edges of terminals of a reference electronic device and, based thereon, a posture of the electronic device to be tested is corrected.

Claims

1. An electronic device handling apparatus for conducting a test of electric characteristics of an electronic device having terminals at its end edge portions by conveying said electronic device to a contact portion and bringing it electrically contact with the contact portion, comprising:

an image pickup apparatus for taking an image of terminals of a predetermined electronic device; and

an edge detection means for extracting edges of terminals of said electronic device from data of an image taken by said image pickup apparatus and locating positions of said edges.

2. The electronic device handling apparatus as set forth in claim 1, wherein said edge detection means extracts edges of terminals being in the direction crossing with an arrangement direction of terminals of said electronic device.

3. The electronic device handling apparatus as set forth in claim 1, wherein

said electronic device has terminals at its end edge portions in the X-axis direction and end edge portions in the Y-axis direction, and

said edge detection means extracts edges of terminals arranged in the X-axis direction of said electronic device and extracts edges of terminals arranged in the Y-axis direction of said electronic device.

4. The electronic device handling apparatus as set forth in claim 1, wherein said edge detection means performs scanning in a predetermined direction on terminals of said electronic device and extracts edges where light changes to dark and edges where dark changes to light.

5. The electronic device handling apparatus as set forth in claim 4, wherein said edge detection means locates positions of edges of said terminals after performing binarization processing on said extracted edges.

6. The electronic device handling apparatus as set forth in claim 5, wherein binarization is performed by taking out edges where light changes to dark and edges where dark changes to light at a time in said binarization processing.

7. The electronic device handling apparatus as set forth in claim 5, wherein binarization is performed by taking out edges where light changes to dark and edges where dark changes to light separately in said binarization processing.

8. The electronic device handling apparatus as set forth in claim 4, wherein

said electronic device has terminals on its end edge portions in the X-axis direction or its end edge portions in the Y-axis direction, and

said scanning is performed along an arrangement direction of terminals of said electronic device.

9. The electronic device handling apparatus as set forth in claim 4, wherein

said electronic device has terminals on its end edge portions in the X-axis direction and end edge portions in the Y-axis direction, and

said scanning is performed in the X-axis direction and the Y-axis direction.

10. The electronic device handling apparatus as set forth in claim 1, comprising a conveyor device capable of holding an IC device and pressing it against said contact portion:

wherein said image pickup apparatus takes an image of terminals of a pre-test electronic device held by said conveyor device.

11. The electronic device handling apparatus as set forth in claim 1, furthermore comprising:

a memory device for storing reference positional information of edges of terminals of a reference electronic device; and

a positional deviation detection means for reading said reference positional information of said edges from said memory device, comparing the read-out reference positional information of edges with information of positions of said edges located by said edge detection means and calculating a positional deviation amount of said predetermined electronic device.

12. The electronic device handling apparatus as set forth in claim 11, comprising a conveyor device capable of holding an IC device and pressing it against said contact portion:

wherein

said conveyor device comprises a posture correction device for correcting a posture of an electronic device held by the conveyor device;

said image pickup apparatus takes an image of terminals of pre-test electronic device held by said conveyor device; and

said conveyor device corrects a posture of an electronic device held by the conveyor device based on a positional deviation amount of said electronic device detected by said positional deviation detection means.

13. The electronic device handling apparatus as set forth in claim 1, furthermore comprising:

a memory device for storing reference positional information of edges of terminals of a reference electronic devices; and

a defective terminal detection means for detecting a defective terminal of said predetermined electronic device by reading said reference positional information of edges from said memory device and comparing the read-out reference positional information of edges with information of positions of said edges located by said edge detection means.

14. An electronic device handling apparatus for conducting a test of electric characteristics of an electronic device having terminals at its end edge portions by conveying said electronic device to a contact portion and bringing it electrically contact with the contact portion, comprising:

an image pickup apparatus for taking an image of terminals of a predetermined electronic devices;

an edge pitch detection means for detecting edge pitches of said terminals by extracting edges of terminals of said electronic device from data of image taken by said image pickup apparatus;

a memory device for storing reference pitch information of edges of terminals of a reference electronic device; and

a size checking means for checking a size of said predetermined electronic device by reading reference pitch information of edges of terminals of a reference electronic device and comparing the read-out reference pitch information of edges with information of said edge pitches detected by said edge pitch detection means.

15. A position detection method for detecting a position of an electronic device having terminals at its end edge portion in an electronic device handling apparatus, comprising:

a first step of taking an image of terminals of an electronic device; and

a second step of extracting edges of terminals of said electronic device from data of an image taken in said first step and locating a position of said edges.

16. The position detection method as set forth in claim 15, wherein said second step includes extracting of edges of terminals being in the direction crossing with an arrangement direction of terminals of said electronic device.

17. The position detection method as set forth in claim 15, wherein

said electronic device has terminals at its end edge portions in the X-axis direction and end edge portions in the Y-axis direction, and

said second step comprises a step of extracting edges of terminals arranged in the X-axis direction of said electronic device and a step of extracting edges of terminals arranged in the Y-axis direction of said electronic device.

18. The position detection method as set forth in claim 15, wherein said second step includes performing of scanning in a predetermined direction on terminals of said electronic device and extracting of edges where light changes to dark and edges where dark changes to light.

19. The position detection method as set forth in claim 18, wherein positions of edges of said terminals are located after performing binarization processing on said extracted edges in said second step.

20. The position detection method as set forth in claim 19, wherein binarization is performed by taking out edges where light changes to dark and edges where dark changes to light at a time in said binarization processing.

21. The position detection method as set forth in claim 19, wherein binarization is performed by taking out edges where light changes to dark and edges where dark changes to light separately in said binarization processing.

22. The position detection method as set forth in claim 18, wherein

said electronic device has terminals at its end edge portions in the X-axis direction or its end edge portions in the Y-axis direction, and

said scanning is performed along an arrangement direction of terminals of said electronic device.

23. The position detection method as set forth in claim 18, wherein

said electronic device has terminals at its end edge portions in the X-axis direction and end edge portions in the Y-axis direction, and

said scanning is performed in the X-axis direction and the Y-axis direction.

24. A positional deviation detection method for detecting positional deviation of an electronic device having terminals at its end edge portions in an electronic device handling apparatus, comprising:

a first step of storing reference positional information of edges of terminals of a reference electronic device;

a second step of taking an image of terminals of a predetermined electronic device;

a third step of extracting edges of terminals of said electronic device from data of an image taken in said second step and locating positions of said edges; and

a fourth step of reading reference positional information of said edges from said memory device, comparing the read-out reference positional information of edges with information of positions of said edges located in said third step and calculating a positional deviation amount of said predetermined electronic device.

25. A posture correction method for correcting a posture of an electronic device having terminals at its end edge portions held by a conveyor device in an electronic device handling apparatus, comprising:

a first step of storing reference positional information of edges of terminals of a reference electronic device;

a second step of taking an image of terminals of an electronic device held by said conveyor device;

a third step of extracting edges of terminals of said electronic device from data of an image taken in said second step and locating positions of said edges;

a fourth step of reading reference positional information of said edges from said memory device, comparing the read-out reference positional information of edges with information of positions of said edges located in said third step and calculating a positional deviation amount of an electronic device held by said conveyor device; and

a fifth step of correcting a posture of an electronic device held by said conveyor device based on a positional deviation amount of said electronic device detected in said fourth step.

26. A defective terminal detection method for detecting a defective terminal of an electronic device having terminals at its end edge portions in an electronic device handling apparatus, comprising:

a first step of storing reference positional information of edges of terminals of a reference electronic device;

a second step of taking an image of terminals of a predetermined electronic device;

a third step of extracting edges of terminals of said electronic device from data of an image taken in said second step and locating positions of said edges; and

a fourth step of reading reference positional information of said edges from said memory device and comparing the read-out reference positional information of edges with information of positions of said edges located in said third step so as to detect a defective terminal of said predetermined electronic device.

27. A size checking method for checking a size of an electronic device having terminals at its end edge portions in an electronic device handling apparatus, comprising:

a first step of storing reference pitch information of edges of terminals of a reference electronic device;

a second step of taking an image of terminals of a predetermined electronic device;

a third step of extracting edges of terminals of said electronic device from data of an image taken in said second step and detecting edge pitches of said terminals; and

a fourth step of reading reference pitch information of said edges from said memory device and comparing the read-out reference pitch information of edges with information of said edge pitches detected in said third step so as to check a size of said predetermined electronic device.