Process for synthesizing a thin film or composition layer via non-contact pressure containment
First Claim
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1. A process for synthesizing a thin film or composition layer from a plurality of precursor layers supported on a substrate, said process comprising the steps of:
- a) exposing said plurality of precursor layers to non-contact pressure; and
b) heating said plurality of precursor layers under said non-contact pressure to a reaction temperature sufficient to promote the formation of said film or composition layer.
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Abstract
A process for synthesizing a thin film or composition layer from a plurality of precursor layers supported on a substrate, includes exposing the plurality of precursor layers to non-contact pressure, and heating the plurality of precursor layers under the non-contact pressure to a reaction temperature sufficient to promote the formation of the film or composition layer.
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Citations
19 Claims
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1. A process for synthesizing a thin film or composition layer from a plurality of precursor layers supported on a substrate, said process comprising the steps of:
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a) exposing said plurality of precursor layers to non-contact pressure; and b) heating said plurality of precursor layers under said non-contact pressure to a reaction temperature sufficient to promote the formation of said film or composition layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
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Specification