INTEGRATED MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS) SENSOR DEVICE
First Claim
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1. An integrated sensor device, comprising:
- a first substrate including a surface portion;
a second substrate coupled to the surface portion of the first substrate in a stacked configuration, wherein a cavity is defined between the first substrate and the second substrate;
one or more micro-electro-mechanical systems (MEMS) sensors located at least partially in the first substrate, wherein the MEMS sensor communicates with the cavity; and
one or more additional sensors.
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Abstract
An integrated sensor device is provided. The integrated sensor device comprises a first substrate including a surface portion and a second substrate coupled to the surface portion of the first substrate in a stacked configuration, wherein a cavity is defined between the first substrate and the second substrate. The integrated sensor device also comprises one or more micro-electro-mechanical systems (MEMS) sensors located at least partially in the first substrate, wherein the MEMS sensor communicates with the cavity. The integrated sensor device further comprises one or more additional sensors.
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Citations
20 Claims
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1. An integrated sensor device, comprising:
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a first substrate including a surface portion; a second substrate coupled to the surface portion of the first substrate in a stacked configuration, wherein a cavity is defined between the first substrate and the second substrate; one or more micro-electro-mechanical systems (MEMS) sensors located at least partially in the first substrate, wherein the MEMS sensor communicates with the cavity; and one or more additional sensors. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8)
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9. A method of forming an integrated sensor device, the method comprising:
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forming at least a portion of a micro-electro-mechanical systems (MEMS) sensor in a first substrate; forming at least one additional sensor; and bonding the first substrate to the second substrate in a stacked configuration, wherein a cavity is defined between the first substrate and the second substrate, and the MEMS sensor communicates with the cavity. - View Dependent Claims (10, 11, 12, 13, 14)
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15. A navigation device, comprising:
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an integrated sensor device, comprising; a first substrate including a surface portion; a second substrate coupled to the surface portion of the first substrate in a stacked configuration, wherein a cavity is defined between the first substrate and the second substrate; one or more micro-electro-mechanical systems (MEMS) sensors located at least partially in the first substrate, wherein the one or more MEMS sensors communicates with the cavity; and one or more additional sensors; a processor operatively coupled to the integrated sensor device; and a navigation module run by the processor, wherein the navigation module is configured to determine orientation information based on data from the integrated sensor device. - View Dependent Claims (16, 17, 18, 19, 20)
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Specification