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INTEGRATED MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS) SENSOR DEVICE

  • US 20100312468A1
  • Filed: 06/03/2009
  • Published: 12/09/2010
  • Est. Priority Date: 06/03/2009
  • Status: Active Grant
First Claim
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1. An integrated sensor device, comprising:

  • a first substrate including a surface portion;

    a second substrate coupled to the surface portion of the first substrate in a stacked configuration, wherein a cavity is defined between the first substrate and the second substrate;

    one or more micro-electro-mechanical systems (MEMS) sensors located at least partially in the first substrate, wherein the MEMS sensor communicates with the cavity; and

    one or more additional sensors.

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