MICROMACHINED TUNING FORK GYROSCOPES WITH ULTRA-HIGH SENSITIVITY AND SHOCK REJECTION
First Claim
1. A vibratory rate z-axis gyroscope characterized by drive-mode and sense-mode quality factors and rate sensitivity comprising:
- at least two decoupled vibratory tines;
a levered drive-mode mechanism coupled between the tines to structurally force anti-phase drive-mode motion of the tines at a predetermined drive frequency, to eliminate spurious frequency modes of the anti-phase drive-mode motion of the tines lower than the predetermined drive frequency and to provide synchronization of drive- and sense-mode motion of the tines; and
a sense-mode mechanism coupled between the tines arranged and configured to provide a linearly coupled, dynamically balanced anti-phase sense-mode motion of the tines to minimize substrate energy dissipation and to enhance the sense-mode quality factor and rate sensitivity.
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Accused Products
Abstract
A vibratory rate z-axis gyroscope is characterized by drive-mode and sense-mode quality factors and rate sensitivity and is fabricated with at least two decoupled vibratory tines, a levered drive-mode mechanism coupled between the tines to structurally force anti-phase drive-mode motion of the tines at a predetermined drive frequency, to eliminate spurious frequency modes of the anti-phase drive-mode motion of the tines lower than the predetermined drive frequency and to provide synchronization of drive- and sense-mode motion of the tines, and a sense-mode mechanism coupled between the tines arranged and configured to provide a linearly coupled, dynamically balanced anti-phase sense-mode motion of the tines to minimize substrate energy dissipation and to enhance the sense-mode quality factor and rate sensitivity.
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Citations
26 Claims
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1. A vibratory rate z-axis gyroscope characterized by drive-mode and sense-mode quality factors and rate sensitivity comprising:
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at least two decoupled vibratory tines; a levered drive-mode mechanism coupled between the tines to structurally force anti-phase drive-mode motion of the tines at a predetermined drive frequency, to eliminate spurious frequency modes of the anti-phase drive-mode motion of the tines lower than the predetermined drive frequency and to provide synchronization of drive- and sense-mode motion of the tines; and a sense-mode mechanism coupled between the tines arranged and configured to provide a linearly coupled, dynamically balanced anti-phase sense-mode motion of the tines to minimize substrate energy dissipation and to enhance the sense-mode quality factor and rate sensitivity. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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21. A gyroscope comprising:
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a frame having with capacitive frame electrodes; a proof mass; and a plurality of shuttles coupled between the frame and proof mass, where each shuttle has capacitive shuttle electrodes forming capacitors together with the frame electrodes, the capacitors on the shuttles used for electrostatic actuation, capacitive detection, and active control of the proof mass.
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22. A method of operating a vibratory rate z-axis gyroscope characterized by drive-mode and sense-mode quality factors and rate sensitivity comprising:
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driving at least two decoupled vibratory tines in anti-phase motion at a predetermined drive frequency; structurally forcing the at least two decoupled vibratory tines in anti-phase motion by a levered drive-mode mechanism coupled between the tines to eliminate spurious frequency modes of the anti-phase drive-mode motion of the tines lower than the predetermined drive frequency and to provide synchronization of drive- and sense-mode motion of the tines; and sensing dynamically balanced linearly coupled anti-phase sense-mode motion of the tines to minimize substrate energy dissipation and to enhance the sense-mode quality factor and rate sensitivity. - View Dependent Claims (23, 24, 25, 26)
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Specification