MEMS DEVICE AND METHOD OF FABRICATING THE MEMS DEVICE
First Claim
1. A MEMS device comprising:
- a substrate;
a first support portion and a second support portion, the first and second support portions being arranged on the substrate;
a first movable portion that has a first movable electrode, is fixed to the first support portion at a position apart from the first movable electrode, and is displaced by external force; and
a second movable portion that has a second movable electrode arranged opposite to the first movable electrode, is fixed to the second support portion at a position apart from the second movable electrode, and is displaced by the external force,wherein the first movable portion is fixed to the first support portion between a gravitational center position of the first movable portion and an opposite position where the first movable electrode and the second movable electrode are opposed to each other, and the second movable portion is fixed to the second support portion at a position opposed to the opposite position while sandwiching a gravitational center position of the second movable portion therebetween.
1 Assignment
0 Petitions
Accused Products
Abstract
A MEMS device capable of detecting external force with high sensitivity is disclosed. The MEMS device includes: first and second support portions arranged on a substrate; a first movable portion that has a first movable electrode, is fixed to the first support portion at a position apart from the first movable electrode, and is displaced by the external force; and a second movable portion that has a second movable electrode arranged opposite to the first movable electrode, is fixed to the second support portion at a position apart from the second movable electrode, and is displaced by the external force, wherein the first movable portion is fixed to the first support portion between a gravitational center position of the first movable portion and an opposite position where the first movable electrode and the second movable electrode are opposed to each other, and the second movable portion is fixed to the second support portion at a position opposed to the opposite position while sandwiching a gravitational center position of the second movable portion therebetween.
33 Citations
23 Claims
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1. A MEMS device comprising:
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a substrate; a first support portion and a second support portion, the first and second support portions being arranged on the substrate; a first movable portion that has a first movable electrode, is fixed to the first support portion at a position apart from the first movable electrode, and is displaced by external force; and a second movable portion that has a second movable electrode arranged opposite to the first movable electrode, is fixed to the second support portion at a position apart from the second movable electrode, and is displaced by the external force, wherein the first movable portion is fixed to the first support portion between a gravitational center position of the first movable portion and an opposite position where the first movable electrode and the second movable electrode are opposed to each other, and the second movable portion is fixed to the second support portion at a position opposed to the opposite position while sandwiching a gravitational center position of the second movable portion therebetween. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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21. A method of fabricating a MEMS device including a first movable portion and a second movable portion opposed to the first movable portion, the method comprising the steps of:
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forming an upper insulating film on an upper surface of a substrate made of single crystal; patterning the upper insulating film, and forming trenches; filling an insulating film into the trenches, and forming insulating isolation regions; patterning the upper insulating film, and forming a metal electrode layer on an entire device surface; patterning the metal electrode layer, and forming a first movable portion-purpose wring electrode connected to the first movable portion and a second movable portion-purpose wiring electrode connected to the second movable portion; etching the substrate to a predetermined depth by selective etching using the upper insulating film as a mask; depositing an insulating film on the entire device surface, and forming sidewall insulating films on sidewall portions of etched grooves; removing by etching the insulating films deposited on the device surface and bottom surfaces of the etched grooves, and exposing respective surfaces of the first movable portion-purpose wiring electrode and the second movable portion-purpose wiring electrode; and by isotropic etching for the substrate, forming spaces, and forming the first movable portion and the second movable portion, the first and second movable portion being obtained by patterning the substrate. - View Dependent Claims (22, 23)
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Specification