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Ultrasonic probe

  • US 20100314355A1
  • Filed: 06/03/2010
  • Published: 12/16/2010
  • Est. Priority Date: 06/12/2009
  • Status: Active Grant
First Claim
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1. A method of manufacturing a crystal resonator in which:

  • on both principle surfaces of an AT-cut crystal wafer, there is formed a mask that corresponds to a large number of rectangular crystal elements and to frame sections that are respectively joined with said crystal elements by supporting sections and respectively surround said crystal elements, and etching is conducted, to thereby form a crystal wafer in which a large number of the crystal elements are joined with the frame sections by the supporting sections; and

    then said crystal elements are mechanically cut away from the frame sections, wherein;

    said mask, together with said crystal element and the frame section including the supporting section, has a projecting section, which extends in a +X-axis direction, on both end sections on a +X-axis one end of said crystal element;

    a crystal wafer, in which the large number of crystal elements joined with the frame sections by the supporting sections, is obtained by said means of etching;

    the projecting sections of the crystal element corresponding to said mask are distanced from said frame section at least after the etching has been conducted; and

    the etching is conducted while forming triangular inclined surfaces with the apexes on the tip end of each corner section of mutually opposite surfaces, between both sides of the one end section.

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