SEMICONDUCTOR STRUCTURE AND METHOD OF MANUFACTURING A SEMICONDUCTOR STRUCTURE
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Abstract
A semiconductor structure is formed of nitrides of group III metals having wurtzite crystal structure and grown in vapor phase on a (0001) oriented semiconductor substrate. The structure comprises a bottom cladding layer, a top cladding layer, and a diffusion region positioned between the cladding layers for diffusing light propagating within the semiconductor structure. The diffuse region has refractive index different from those of the cladding layers and non-flat surfaces for providing light diffusing interfaces between the diffusion region and the cladding layers. According to the invention, the diffusion region comprises a plurality of diffusion layers, compositions and thicknesses of said diffusion layers having been chosen to avoid formation of strain-induced dislocations in the diffusion region, and adjacent diffusion layers having different refractive indices in order to further enhance the diffusion efficiency.
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16 Claims
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10. A method of manufacturing a semiconductor structure (1) formed of nitrides of group III metals having wurtzite crystal structure and grown in vapor phase on a (0001) oriented semiconductor substrate (2,3), the method comprising steps of
growing in vapor phase a bottom cladding layer (4); -
growing in vapor phase a diffusion region (6,7) above the bottom cladding layer for diffusing light propagating within the semiconductor structure (1), the diffusion region having a refractive index different from that of the bottom cladding layer and non-flat surfaces; and growing in vapor phase a top cladding layer (5) above the diffusion region, the top cladding layer having a flat upper surface (9), a refractive index different from that of the diffusion region, and a lattice constant the same as that of the bottom cladding layer, characterized in that the growing of the diffusion region comprises steps of growing a plurality of diffusion layers (6,7), compositions and thicknesses of the diffusion layers having been chosen to avoid formation of strain-induced dislocations in the layer interfaces, and adjacent diffusion layers (6,7) having different refractive indices in order to further enhance the diffusion efficiency.
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Specification