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Production of Ultrafine Particles in a Plasma System Having Controlled PressureZones

  • US 20100314788A1
  • Filed: 06/28/2010
  • Published: 12/16/2010
  • Est. Priority Date: 08/18/2006
  • Status: Abandoned Application
First Claim
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1. A system for making ultrafine particles, comprising:

  • (a) a plasma chamber having axially spaced inlet and outlet ends;

    (b) a high temperature plasma positioned adjacent the inlet end of the plasma chamber;

    (c) at least one precursor inlet for introducing a precursor to the plasma chamber where the precursor is heated by the plasma to produce a gaseous product stream flowing toward the outlet end of the plasma chamber; and

    (d) a converging member located adjacent the outlet end of the plasma chamber through which the gaseous product stream flows, wherein a substantially constant pressure is maintained in the plasma chamber and the converging member during operation of the apparatus.

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