Production of Ultrafine Particles in a Plasma System Having Controlled PressureZones
First Claim
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1. A system for making ultrafine particles, comprising:
- (a) a plasma chamber having axially spaced inlet and outlet ends;
(b) a high temperature plasma positioned adjacent the inlet end of the plasma chamber;
(c) at least one precursor inlet for introducing a precursor to the plasma chamber where the precursor is heated by the plasma to produce a gaseous product stream flowing toward the outlet end of the plasma chamber; and
(d) a converging member located adjacent the outlet end of the plasma chamber through which the gaseous product stream flows, wherein a substantially constant pressure is maintained in the plasma chamber and the converging member during operation of the apparatus.
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Abstract
A system and method for making ultrafine particles are disclosed. A high temperature plasma is generated at an inlet end of a plasma chamber into which precursor materials are introduced. A converging member is located adjacent an outlet end of the plasma chamber. During operation, a substantially constant pressure and/or material flow pattern is maintained to reduce or eliminate fouling of the system.
68 Citations
20 Claims
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1. A system for making ultrafine particles, comprising:
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(a) a plasma chamber having axially spaced inlet and outlet ends; (b) a high temperature plasma positioned adjacent the inlet end of the plasma chamber; (c) at least one precursor inlet for introducing a precursor to the plasma chamber where the precursor is heated by the plasma to produce a gaseous product stream flowing toward the outlet end of the plasma chamber; and (d) a converging member located adjacent the outlet end of the plasma chamber through which the gaseous product stream flows, wherein a substantially constant pressure is maintained in the plasma chamber and the converging member during operation of the apparatus. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. A system for making ultrafine particles, comprising:
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(a) a plasma chamber having axially spaced inlet and outlet ends; (b) a high temperature plasma positioned adjacent the inlet end of the plasma chamber; (c) at least one precursor inlet for introducing a precursor to the plasma chamber where the precursor is heated by the plasma to produce a gaseous product stream flowing toward the outlet end of the plasma chamber; and (d) a converging member located adjacent the outlet end of the plasma chamber through which the gaseous product stream flows, wherein a substantially uniform material flow pattern is maintained in the plasma chamber and the converging member during operation of the apparatus. - View Dependent Claims (18, 19)
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20. A method of making ultrafine particles comprising:
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introducing a precursor material into a plasma chamber; heating the precursor material in the plasma chamber with a plasma to produce a gaseous product stream flowing toward an outlet end of the plasma chamber; and passing the gaseous product stream through a converging member located adjacent the outlet end of the plasma chamber, wherein a substantially constant pressure and a substantially uniform material flow pattern are maintained in the plasma chamber and converging member as the gaseous product stream flows through the plasma chamber and converging member.
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Specification