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Maintenance method, maintenance device, exposure apparatus, and device manufacturing method

  • US 20100315609A1
  • Filed: 08/16/2010
  • Published: 12/16/2010
  • Est. Priority Date: 12/06/2004
  • Status: Active Grant
First Claim
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1. A maintenance method comprising:

  • moving a stage of an exposure apparatus in which a member is used for forming a liquid immersion region of a first liquid on a substrate and in which the substrate is exposed via the first liquid, the member having a liquid flow passage and the stage being moved to a position away from under the member;

    placing a container of a maintenance system under the member in the exposure apparatus; and

    cleaning the member with a second liquid, the second liquid being supplied from a supply outlet such that the second liquid comes into contact with the member and the container placed under the member receiving the supplied second liquid.

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