Capacitors Having Dielectric Regions That Include Multiple Metal Oxide-Comprising Materials
First Claim
Patent Images
1. A capacitor comprising:
- an inner conductive metal capacitor electrode and an outer conductive metal capacitor electrode; and
a capacitor dielectric region received between the inner and the outer conductive metal capacitor electrodes and having a thickness no greater than 150 Angstroms, the capacitor dielectric region comprising;
a first Al2O3-comprising material outward of the inner electrode, the first Al2O3-comprising material having a thickness of from 2 Angstroms to 10 Angstroms;
a ZrO2-comprising material outward of the first Al2O3-comprising material, the ZrO2-comprising material having a thickness of from 30 Angstroms to 70 Angstroms;
a second Al2O3-comprising material outward of the ZrO2-comprising material, the second Al2O3-comprising material having a thickness of from 2 Angstroms to 16 Angstroms;
a TiO2-comprising material outward of the second Al2O3-comprising material, the TiO2-comprising material having a thickness of from 40 Angstroms to 80 Angstroms; and
a sum of the thicknesses of the first Al2O3-comprising material, the ZrO2-comprising material, and the second Al2O3-comprising material totals no more than 70 Angstroms;
the capacitor dielectric region having in combination a dielectric constant k of at least 35 and leakage current no greater than 1×
10−
7 amps/cm2 at from −
1.1V to +1.1V.
1 Assignment
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Accused Products
Abstract
Capacitors and methods of forming capacitors are disclosed, and which include an inner conductive metal capacitor electrode and an outer conductive metal capacitor electrode. A capacitor dielectric region is received between the inner and the outer conductive metal capacitor electrodes and has a thickness no greater than 150 Angstroms. Various combinations of materials of thicknesses and relationships relative one another are disclosed which enables and results in the dielectric region having a dielectric constant k of at least 35 yet leakage current no greater than 1×10−7 amps/cm2 at from −1.1V to +1.1V.
27 Citations
46 Claims
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1. A capacitor comprising:
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an inner conductive metal capacitor electrode and an outer conductive metal capacitor electrode; and a capacitor dielectric region received between the inner and the outer conductive metal capacitor electrodes and having a thickness no greater than 150 Angstroms, the capacitor dielectric region comprising; a first Al2O3-comprising material outward of the inner electrode, the first Al2O3-comprising material having a thickness of from 2 Angstroms to 10 Angstroms; a ZrO2-comprising material outward of the first Al2O3-comprising material, the ZrO2-comprising material having a thickness of from 30 Angstroms to 70 Angstroms; a second Al2O3-comprising material outward of the ZrO2-comprising material, the second Al2O3-comprising material having a thickness of from 2 Angstroms to 16 Angstroms; a TiO2-comprising material outward of the second Al2O3-comprising material, the TiO2-comprising material having a thickness of from 40 Angstroms to 80 Angstroms; and a sum of the thicknesses of the first Al2O3-comprising material, the ZrO2-comprising material, and the second Al2O3-comprising material totals no more than 70 Angstroms;
the capacitor dielectric region having in combination a dielectric constant k of at least 35 and leakage current no greater than 1×
10−
7 amps/cm2 at from −
1.1V to +1.1V. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16)
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17. A capacitor comprising:
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an inner conductive metal capacitor electrode and an outer conductive metal capacitor electrode; and a capacitor dielectric region received between the inner and the outer conductive metal capacitor electrodes and having a thickness no greater than 150 Angstroms, the capacitor dielectric region comprising; a first Al2O3-comprising material outward of the inner electrode, the first Al2O3-comprising material having a thickness of from 2 Angstroms to 10 Angstroms; a TiO2-comprising material outward of the first Al2O3-comprising material, the TiO2-comprising material having a thickness of from 40 Angstroms to 80 Angstroms; a second Al2O3-comprising material outward of the TiO2-comprising material, the second Al2O3-comprising material having a thickness of from 2 Angstroms to 10 Angstroms; and the capacitor dielectric region having in combination a dielectric constant k of at least 35 and leakage current no greater than 1×
10−
7 amps/cm2 at from −
1.1V to +1.1V. - View Dependent Claims (18)
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19. A capacitor comprising:
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an inner conductive metal capacitor electrode and an outer conductive metal capacitor electrode; and a capacitor dielectric region received between the inner and the outer conductive metal capacitor electrodes and having a thickness no greater than 150 Angstroms, the capacitor dielectric region comprising; an HfO2-comprising material outward of the inner electrode, the HfO2-comprising material having a thickness of from 10 Angstroms to 50 Angstroms; a TiO2-comprising material outward of the HfO2-comprising material, the TiO2-comprising material having a thickness of from 40 Angstroms to 80 Angstroms; an Al2O3-comprising material outward of the TiO2-comprising material, the Al2O3-comprising material having a thickness of from 2 Angstroms to 10 Angstroms; and the capacitor dielectric region having in combination a dielectric constant k of at least 35 and leakage current no greater than 1×
10−
7 amps/cm2 at from −
1.1V to +1.1V.
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20-23. -23. (canceled)
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24. A capacitor comprising:
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an inner conductive metal capacitor electrode and an outer conductive metal capacitor electrode; and a capacitor dielectric region received between the inner and the outer conductive metal capacitor electrodes and having a thickness no greater than 150 Angstroms, the capacitor dielectric region comprising; an optional first Al2O3-comprising material outward of the inner electrode, the optional first Al2O3-comprising material having a thickness of from 0 Angstroms to 10 Angstroms; a ZrO2-comprising material outward of the inner electrode and outward of the optional first Al2O3-comprising material if the optional first Al2O3-comprising material is present, the ZrO2-comprising material having a thickness of from 30 Angstroms to 70 Angstroms; a second Al2O3-comprising material outward of the ZrO2-comprising material, the second Al2O3-comprising material having a thickness of from 2 Angstroms to 16 Angstroms; a TiO2-comprising material outward of the second Al2O3-comprising material, the TiO2-comprising material having a thickness of from 40 Angstroms to 80 Angstroms; a third Al2O3-comprising material outward of the TiO2-comprising material, the third Al2O3-comprising material having a thickness of from 2 Angstroms to 10 Angstroms; and a sum of the thicknesses of the optional first Al2O3-comprising material if present, the ZrO2-comprising material, and the second Al2O3-comprising material totals no more than 70 Angstroms;
the capacitor dielectric region having in combination a dielectric constant k of at least 35 and leakage current no greater than 1×
10−
7 amps/cm2 at from −
1.1V to +1.1V.
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25-26. -26. (canceled)
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27. A capacitor comprising:
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an inner conductive metal capacitor electrode and an outer conductive metal capacitor electrode; and a capacitor dielectric region received between the inner and the outer conductive metal capacitor electrodes and having a thickness no greater than 150 Angstroms, the capacitor dielectric region comprising; a first Al2O3-comprising material outward of the inner electrode, the first Al2O3-comprising material having a thickness of from 2 Angstroms to 10 Angstroms; a ZrO2-comprising material outward of the first Al2O3-comprising material, the ZrO2-comprising material having a thickness of from 30 Angstroms to 70 Angstroms; a TiO2-comprising material outward of the ZrO2-comprising material, the TiO2-comprising material having a thickness of from 40 Angstroms to 80 Angstroms; a second Al2O3-comprising material outward of the TiO2-comprising material, the second Al2O3-comprising material having a thickness of from 2 Angstroms to 10 Angstroms; and the capacitor dielectric region having in combination a dielectric constant k of at least 35 and leakage current no greater than 1×
10−
7 amps/cm2 at from −
1.1V to +1.1V.
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28. A capacitor comprising:
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an inner conductive metal capacitor electrode and an outer conductive metal capacitor electrode; and a capacitor dielectric region received between the inner and the outer conductive metal capacitor electrodes and having a thickness no greater than 150 Angstroms, the capacitor dielectric region comprising; a first Al2O3-comprising material outward of the inner electrode, the first Al2O3-comprising material having a thickness of from 2 Angstroms to 10 Angstroms; a ZrO2-comprising material outward of the first Al2O3-comprising material, the ZrO2-comprising material having a thickness of from 30 Angstroms to 70 Angstroms; a second Al2O3-comprising material outward of the ZrO2-comprising material, the second Al2O3-comprising material having a thickness of from 2 Angstroms to 16 Angstroms; a TixMyOz-comprising material outward of the second Al2O3-comprising material, where M is at least one of Zr, Hf, Ta, Si, Nb, or Al;
the TixMyOz-comprising material having a thickness from 5 Angstroms to 100 Angstroms; anda sum of the thicknesses of the first Al2O3-comprising material, the ZrO2-comprising material, and the second Al2O3-comprising material totals no more than 70 Angstroms;
the capacitor dielectric region having in combination a dielectric constant k of at least 35 and leakage current no greater than 1×
10−
7 amps/cm2 at from −
1.1V to +1.1V.
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29. A capacitor comprising:
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an inner conductive metal capacitor electrode and an outer conductive metal capacitor electrode; and a capacitor dielectric region received between the inner and the outer conductive metal capacitor electrodes and having a thickness no greater than 150 Angstroms, the capacitor dielectric region comprising; a TixMyOz-comprising material outward of the inner electrode, where M is at least one of Zr, Hf, Ta, Si, Nb, or Al;
the TixMyOz-comprising material having a thickness from 5 Angstroms to 100 Angstroms;a TiO2-comprising material outward of the TixMyOz-comprising material, the TiO2-comprising material having a thickness of from 40 Angstroms to 80 Angstroms; and the capacitor dielectric region having in combination a dielectric constant k of at least 35 and leakage current no greater than 1×
10−
7 amps/cm2 at from −
1.1V to +1.1V.
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30. A capacitor comprising:
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an inner conductive metal capacitor electrode and an outer conductive metal capacitor electrode; and a capacitor dielectric region received between the inner and the outer conductive metal capacitor electrodes and having a thickness no greater than 150 Angstroms, the capacitor dielectric region comprising; an optional first Al2O3-comprising material outward of the inner electrode, the optional first Al2O3-comprising material having a thickness of from 0 Angstroms to 10 Angstroms; a first material outward of the inner electrode and outward of the optional first Al2O3-comprising material if the optional first Al2O3-comprising material is present, the first material comprising at least one of ZrO2 or HfO2, the first material having a thickness of from 20 Angstroms to 50 Angstroms; an optional second Al2O3-comprising material outward of the first material comprising at least one of ZrO2 or HfO2, the optional second Al2O3-comprising material having a thickness of from 0 Angstroms to 16 Angstroms; a TiO2-comprising material outward of the first material that comprises the at least one of ZrO2 or HfO2 and outward of the optional second Al2O3-comprising material if the optional second Al2O3-comprising material is present, the TiO2-comprising material having a thickness of from 40 Angstroms to 80 Angstroms; a second material outward of the TiO2-comprising material, the second material comprising at least one of ZrO2 or HfO2, the second material having a thickness of from 10 Angstroms to 40 Angstroms, a sum of the thicknesses of the first material and the second material totaling no more than 70 Angstroms; an optional third Al2O3-comprising material outward of the second material comprising at least one of ZrO2 or HfO2, the optional third Al2O3-comprising material having a thickness of from 0 Angstroms to 10 Angstroms; and the capacitor dielectric region having in combination a dielectric constant k of at least 35 and leakage current no greater than 1×
10−
7 amps/cm2 at from −
1.1V to +1.1V.
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31-44. -44. (canceled)
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45. A capacitor comprising:
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an inner conductive metal capacitor electrode and an outer conductive metal capacitor electrode; and a capacitor dielectric region received between the inner and the outer conductive metal capacitor electrodes and having a thickness no greater than 150 Angstroms, the capacitor dielectric region comprising; an optional first Al2O3-comprising material outward of the inner electrode, the optional first Al2O3-comprising material having a thickness of from 0 Angstroms to 2 Angstroms; an AlxZryOz-comprising material outward of the inner electrode and outward of the optional first Al2O3-comprising material if the optional first Al2O3-comprising material is present, the AlxZryOz-comprising material having a thickness of from 2 Angstroms to 30 Angstroms; an optional second Al2O3-comprising material outward of the AlxZryOz-comprising material, the optional second Al2O3-comprising material having a thickness of from 0 Angstroms to 10 Angstroms; a first material outward of the AlxZryOz-comprising material and outward of the optional second Al2O3-comprising material if the optional second Al2O3-comprising material is present, the first material comprising at least one of ZrO2 or TixZryOz or ZraTixAlyOz, the first material having a thickness of from 30 Angstroms to 60 Angstroms; an optional third Al2O3-comprising material outward of the first material comprising at least one of ZrO2 or TixZryOz or ZraTixAlyOz, the optional third Al2O3-comprising material having a thickness of from 0 Angstroms to 4 Angstroms; a second material outward of the first material comprising at least one of ZrO2 or TixZryOz or ZraTixAlyOz and outward of the optional third Al2O3-comprising material if the optional third Al2O3-comprising material is present, the second material comprising at least one of TiO2 or TixZryOz or ZraTixAlyOz, the second material having a thickness of from 10 Angstroms to 70 Angstroms; an optional fourth Al2O3-comprising material outward of the second material comprising at least one of TiO2 or TixZryOz or ZraTixAlyOz, the optional fourth Al2O3-comprising material having a thickness of from 0 Angstroms to 4 Angstroms; and the capacitor dielectric region having in combination a dielectric constant k of at least 35 and leakage current no greater than 1×
10−
7 amps/cm2 at from −
1.1V to +1.1V.
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46-51. -51. (canceled)
Specification