ILLUMINATION OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD
First Claim
1. An illumination optical system which illuminates an illumination target surface on the basis of light from a light source, said illumination optical system comprising:
- a spatial light modulator having a plurality of optical elements arrayed two-dimensionally and being individually controllable;
a distribution forming optical system which forms a predetermined light intensity distribution on an illumination pupil of the illumination optical system on the basis of light having traveled via the spatial light modulator; and
a control unit which integrally controls postures of a group of optical elements according to a shape of the predetermined light intensity distribution formed on the illumination pupil, out of the plurality of optical elements.
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Accused Products
Abstract
There is disclosed an illumination optical system which illuminates an illumination target surface on the basis of light from a light source, said illumination optical system comprising, a spatial light modulator having a plurality of optical elements arrayed two-dimensionally and being individually controllable, a distribution forming optical system which forms a predetermined light intensity distribution on an illumination pupil of the illumination optical system on the basis of light having traveled via the spatial light modulator, and a control unit which integrally controls postures of a group of optical elements according to a shape of the predetermined light intensity distribution formed on the illumination pupil, out of the plurality of optical elements.
21 Citations
27 Claims
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1. An illumination optical system which illuminates an illumination target surface on the basis of light from a light source, said illumination optical system comprising:
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a spatial light modulator having a plurality of optical elements arrayed two-dimensionally and being individually controllable; a distribution forming optical system which forms a predetermined light intensity distribution on an illumination pupil of the illumination optical system on the basis of light having traveled via the spatial light modulator; and a control unit which integrally controls postures of a group of optical elements according to a shape of the predetermined light intensity distribution formed on the illumination pupil, out of the plurality of optical elements. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. An illumination method for illuminating an illumination target surface on the basis of light from a light source through an illumination optical system, said illumination method comprising:
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a first step of guiding light to a spatial light modulator having a plurality of optical elements arrayed two-dimensionally and being individually controllable; and a second step of forming a predetermined light intensity distribution on an illumination pupil of the illumination optical system on the basis of light having traveled via the spatial light modulator, wherein the first step comprises integrally controlling postures of a group of optical elements according to a shape of the predetermined light intensity distribution formed on the illumination pupil, out of the plurality of optical elements. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18)
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19. A control method of a spatial light modulator having a plurality of optical elements arrayed two-dimensionally and being individually controllable, the control method being a method for controlling the spatial light modulator used in an illumination optical system which forms a predetermined light intensity distribution on an illumination pupil on the basis of light from a light source having traveled via the spatial light modulator and which illuminates an illumination target surface on the basis of the light having traveled via the illumination pupil,
the control method of the spatial light modulator comprising integrally controlling postures of a group of optical elements according to a shape of the predetermined light intensity distribution formed on the illumination pupil, out of the plurality of optical elements of the spatial light modulator.
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25. A spatial light modulating device comprising a spatial light modulator having a plurality of optical elements arrayed two-dimensionally and being individually controllable, and a control unit for controlling the plurality of optical elements, the spatial light modulating device being used in an illumination optical system which forms a predetermined light intensity distribution on an illumination pupil on the basis of light from a light source having traveled via the spatial light modulator and which illuminates an illumination target surface on the basis of light having traveled via the illumination pupil,
wherein the control unit integrally controls postures of a group of optical elements according to a shape of the predetermined light intensity distribution formed on the illumination pupil, out of the plurality of optical elements of the spatial light modulator.
Specification