FILM COATING APPARATUS FOR CHEMICAL VAPOR DEPOSITION AND PHYSICAL VAPOR DEPOSITION
First Claim
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1. A film coating apparatus comprising:
- a housing defining a chamber therein;
a holder received in the chamber, the holder capable of holding a workpiece; and
a coating source received in the chamber, the coating source comprising;
a supporting plate comprising a first surface facing the holder, the supporting plate defining a receiving recess at the first surface configured for receiving a target material, and one or more through holes; and
one or more gas jetting heads capable of introducing one or more gases into the chamber, each gas jetting head passing through one respective through hole and being fixed in the through hole.
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Abstract
An exemplary film coating apparatus includes a housing, a holder for holding a workpiece, and a coating source. The housing defines a chamber therein. The holder and the coating source are received in the chamber. The coating source includes a supporting plate and a number of gas jetting heads. The supporting plate includes a first surface facing the holder, and defines a receiving recess at the first surface configured for receiving a target material, and a number of through holes. The gas jetting heads are capable of introducing one or more gases into the chamber, each gas jetting head passes through one respectively through hole and is fixed in the through hole.
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Citations
15 Claims
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1. A film coating apparatus comprising:
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a housing defining a chamber therein; a holder received in the chamber, the holder capable of holding a workpiece; and a coating source received in the chamber, the coating source comprising; a supporting plate comprising a first surface facing the holder, the supporting plate defining a receiving recess at the first surface configured for receiving a target material, and one or more through holes; and one or more gas jetting heads capable of introducing one or more gases into the chamber, each gas jetting head passing through one respective through hole and being fixed in the through hole. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A film coating apparatus comprising:
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a housing defining a chamber therein; a holder received in the chamber, the holder configured for holding a workpiece; and a coating source received in the chamber, the coating source comprising; a supporting plate comprising a first surface facing the holder, the supporting plate defining a receiving recess at the first surface, and one or more through holes; one or more gas jetting heads capable of introducing gases into the chamber, each gas jetting head passing through one respective through hole and being fixed in the through hole; and a target material received in the receiving recess. - View Dependent Claims (9, 10, 11, 12, 13, 14)
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15. A film coating apparatus comprising:
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a housing defining a chamber therein; a holder received in the chamber, the holder capable of holding a workpiece; and a coating source received in the chamber, the coating source comprising; a supporting plate comprising a first surface facing the holder, the supporting plate defining a receiving recess at the first surface configured for receiving a target material; and one or more gas jetting heads fixed in the supporting plate and capable of introducing one or more gases into the chamber at a side of the supporting plate corresponding to the first surface.
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Specification