THIN FILM TRANSISTOR SUBSTRATE AND METHOD OF MANUFACTURING THE SAME
First Claim
1. A thin film transistor substrate which controls a display of a display device, comprising,a first metal line to which a voltage is applied by a driver circuit,wherein the first metal line includes a first shape as a portion of alignment mark.
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Accused Products
Abstract
In a portion of a gate signal line and a portion of a common signal line, cutouts which are arranged perpendicular to the extending direction of these lines and open to face each other in an opposed manner are formed. A cruciform shape in appearance is formed by combining a gap defined between the gate signal line and the common signal line extending parallel to each other and the cutouts to each other. The cruciform portion formed in this manner is used as an alignment mark in the exposure of a photolithography step of a layer formed later. Due to such a constitution, in manufacturing a thin film transistor substrate, it is possible to realize the highly accurate alignment without forming a pattern only used for alignment.
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Citations
14 Claims
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1. A thin film transistor substrate which controls a display of a display device, comprising,
a first metal line to which a voltage is applied by a driver circuit, wherein the first metal line includes a first shape as a portion of alignment mark.
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4. The thin film transistor substrate according to claim wherein the cutout has a cruciform shape.
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12. A method of manufacturing a thin film transistor substrate which controls a display of a display device, the method comprising:
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forming a first metal line which has a first shape in at least a part thereof, and performing alignment and exposure using the first shape as a portion of an alignment mark. - View Dependent Claims (13, 14)
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Specification