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THIN-FILM TRANSISTOR ARRAY, METHOD OF FABRICATING THE SAME, AND LIQUID CRYSTAL DISPLAY DEVICE INCLUDING THE SAME

  • US 20100320471A1
  • Filed: 08/25/2010
  • Published: 12/23/2010
  • Est. Priority Date: 08/09/2006
  • Status: Active Grant
First Claim
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1. A method of fabricating a thin-film transistor array, comprising:

  • forming an oxide-semiconductor film;

    patterning said oxide-semiconductor film into a channel, a source and a drain of a thin-film transistor, a pixel electrode, a gate terminal, and a source terminal; and

    exposing at least a part of each of said source, said drain, said pixel electrode, said source terminal, and said gate terminal to one of reducing plasma and plasma containing at least one of B, Al, Ga, In and F for reducing a resistivity of said part.

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