NONVOLATILE SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR MANUFACTURING SAME
First Claim
1. A nonvolatile semiconductor memory device, comprising:
- a semiconductor substrate;
a memory unit; and
a circuit unit provided between the semiconductor substrate and the memory unit,the memory unit including;
a stacked structural unit having a plurality of electrode films alternately stacked with a plurality of inter-electrode-film insulating films in a first direction perpendicular to a major surface of the substrate;
a first semiconductor pillar piercing the stacked structural unit in the first direction; and
a first storage unit provided corresponding to an intersection between the electrode films and the first semiconductor pillar,the circuit unit including;
a first transistor having a first source region of a first conductivity type and a first drain region of the first conductivity type;
a second transistor having a second source region of a second conductivity type and a second drain region of the second conductivity type;
a first interconnect including silicide provided on a side of the first transistor and the second transistor opposite to the semiconductor substrate;
a first contact plug made of polysilicon of the first conductivity type electrically connecting the first interconnect to at least one selected from the first source region and the first drain region; and
a second contact plug made of polysilicon of the second conductivity type electrically connecting the first interconnect to at least one selected from the second source region and the second drain region.
1 Assignment
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Accused Products
Abstract
A nonvolatile semiconductor memory device includes: a semiconductor substrate; a memory unit; and a circuit unit provided between the semiconductor substrate and the memory unit. The memory unit includes: a stacked structural unit having electrode films alternately stacked with inter-electrode-film insulating films; a semiconductor pillar piercing the stacked structural unit; and a storage unit provided corresponding to an intersection between the electrode films and the semiconductor pillar. The circuit unit includes first and second transistors having different conductivity type, a first interconnect, and first and second contact plugs. The first interconnect includes silicide provided on a side of the first and second transistors opposite to the semiconductor substrate. The first contact plug made of polysilicon of the first conductivity type connects the first interconnect to the first transistor. The second contact plug made of polysilicon of the second conductivity type connects the first interconnect to the second transistor.
235 Citations
20 Claims
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1. A nonvolatile semiconductor memory device, comprising:
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a semiconductor substrate; a memory unit; and a circuit unit provided between the semiconductor substrate and the memory unit, the memory unit including; a stacked structural unit having a plurality of electrode films alternately stacked with a plurality of inter-electrode-film insulating films in a first direction perpendicular to a major surface of the substrate; a first semiconductor pillar piercing the stacked structural unit in the first direction; and a first storage unit provided corresponding to an intersection between the electrode films and the first semiconductor pillar, the circuit unit including; a first transistor having a first source region of a first conductivity type and a first drain region of the first conductivity type; a second transistor having a second source region of a second conductivity type and a second drain region of the second conductivity type; a first interconnect including silicide provided on a side of the first transistor and the second transistor opposite to the semiconductor substrate; a first contact plug made of polysilicon of the first conductivity type electrically connecting the first interconnect to at least one selected from the first source region and the first drain region; and a second contact plug made of polysilicon of the second conductivity type electrically connecting the first interconnect to at least one selected from the second source region and the second drain region. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. A method for manufacturing a nonvolatile semiconductor memory device, comprising:
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forming a first transistor and a second transistor on a major surface of a semiconductor substrate, the first transistor including a first source region of a first conductivity type and a first drain region of the first conductivity type, the second transistor including a second source region of a second conductivity type and a second drain region of the second conductivity type; forming a first contact plug, a second contact plug, and a first interconnect layer, the first contact plug being made of polysilicon of the first conductivity type and aligned in a first direction perpendicular to the major surface to connect to at least one selected from the first source region and the first drain region, the second contact plug being made of polysilicon of the second conductivity type and aligned in the first direction to connect to at least one selected from the second source region and the second drain region, the first interconnect layer including silicide and being connected to one selected from the first contact plug and the second contact plug; and forming a memory unit above the first interconnect layer, the memory unit including; a stacked structural unit having a plurality of electrode films alternately stacked with a plurality of inter-electrode-film insulating films in the first direction; a first semiconductor pillar piercing the stacked structural unit in the first direction; and a first storage unit provided corresponding to an intersection between the electrode films and the first semiconductor pillar. - View Dependent Claims (16, 17, 18, 19, 20)
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Specification