NAND MEMORY CELL STRING HAVING A STACKED SELECT GATE STRUCTURE AND PROCESS FOR FOR FORMING SAME
First Claim
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1. A memory cell string, comprising:
- a first select gate of said memory cell string comprising a first plurality of elements;
a plurality of wordlines coupled to said first select gate; and
a second select gate comprising a second plurality of elements coupled to said plurality of wordlines wherein the distances between one element of said first and said second plurality of elements and said plurality of wordlines are the same as the distances that exist between each wordline of said plurality of wordlines.
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Abstract
A memory cell string is disclosed. The memory cell string includes a first select gate that includes a first plurality of elements. A plurality of wordlines are coupled to the first select gate and a second select gate, that includes a second plurality of elements, is coupled to the plurality of wordlines. The distances between one element of the first and the second plurality of elements and the plurality of wordlines are the same as the distances that exist between each wordline of the plurality of wordlines.
29 Citations
20 Claims
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1. A memory cell string, comprising:
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a first select gate of said memory cell string comprising a first plurality of elements; a plurality of wordlines coupled to said first select gate; and a second select gate comprising a second plurality of elements coupled to said plurality of wordlines wherein the distances between one element of said first and said second plurality of elements and said plurality of wordlines are the same as the distances that exist between each wordline of said plurality of wordlines. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A NAND flash memory device, comprising:
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a memory controller; and a NAND memory cell string, comprising; a first select gate of a NAND memory cell string that comprises a first plurality of elements; a plurality of wordlines coupled to said first select gate wherein said plurality of wordlines are separated by the same distance; and a second select gate of a NAND memory cell string comprising a second plurality of elements coupled to said plurality of wordlines wherein the distances between a neighboring element of said first and said second plurality of elements and said plurality of wordlines are the same as the distance between each wordline of said plurality of wordlines. - View Dependent Claims (9, 10, 11, 12, 13, 14)
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15. A process for forming a memory cell string, comprising:
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forming a first select gate of a wordline string comprising a first plurality of elements; forming a plurality of wordlines to be coupled to said first select gate; and forming a second select gate comprising a second plurality of elements to be coupled to said plurality of wordlines wherein the distances formed between a first element of said first and said second plurality of elements and said first and last wordlines respectively are the same as the distance that is formed between each wordline of said plurality of wordlines. - View Dependent Claims (16, 17, 18, 19, 20)
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Specification