VERTICAL CAVITY SURFACE EMITTING LASER
First Claim
1. A vertical cavity surface emitting laser, comprising:
- a lower DBR layer;
an upper DBR layer;
an active layer existing between the lower DBR layer and the upper DBR layer; and
a laser emitting region provided on a surface layer of the upper DBR layer, whereinthe upper DBR layer includes a doped first semiconductor multilayer film layer and an undoped second semiconductor multilayer film layer;
an electrode provided on the upper DBR layer is formed in a region which is on an upper part of the first semiconductor multilayer film layer and is surrounded by the second semiconductor multilayer film layer;
the laser emitting region is formed on a surface layer of the second semiconductor multilayer film layer; and
the surface layer of the first semiconductor multilayer film layer is formed by a contact layer and the second semiconductor multilayer film layer is stacked on the contact layer.
1 Assignment
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Accused Products
Abstract
A vertical cavity surface emitting laser includes, a lower DBR layer; an upper DBR layer; an active layer existing between the lower DBR layer and the upper DBR layer; and a laser emitting region provided on a surface layer of the upper DBR layer, in which the upper DBR layer includes a doped first semiconductor multilayer film layer and an undoped second semiconductor multilayer film layer; an electrode provided on the upper DBR layer is formed in a region which is on an upper part of the first semiconductor multilayer film layer and is surrounded by the second semiconductor multilayer film layer; the laser emitting region is formed on a surface layer of the second semiconductor multilayer film layer; and the surface layer of the first semiconductor multilayer film layer is formed by a contact layer and the second semiconductor multilayer film layer is stacked on the contact layer.
7 Citations
5 Claims
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1. A vertical cavity surface emitting laser, comprising:
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a lower DBR layer; an upper DBR layer; an active layer existing between the lower DBR layer and the upper DBR layer; and a laser emitting region provided on a surface layer of the upper DBR layer, wherein the upper DBR layer includes a doped first semiconductor multilayer film layer and an undoped second semiconductor multilayer film layer; an electrode provided on the upper DBR layer is formed in a region which is on an upper part of the first semiconductor multilayer film layer and is surrounded by the second semiconductor multilayer film layer; the laser emitting region is formed on a surface layer of the second semiconductor multilayer film layer; and the surface layer of the first semiconductor multilayer film layer is formed by a contact layer and the second semiconductor multilayer film layer is stacked on the contact layer. - View Dependent Claims (2, 3, 4, 5)
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Specification