MEMS Microphone

• US 20100322451A1
• Filed: 01/01/2010
• Published: 12/23/2010
• Est. Priority Date: 06/19/2009
• Status: Active Grant

• Current Assignee: AAC Technologies Pte Limited (AAC Technologies Holdings Inc.), American Audio Components, Inc.
• Original Assignee: AAC Acoustic Technologies Company Limited, American Audio Components, Inc.
• Inventors: WU, Zhi-Jiang, SU, Yong-Ze, CHEN, Xing-Fu
• Granted Patent: US 8,331,589 B2
• Time in Patent Office: Days
• US Class Current: 381/369
• CPC Class Codes: H04R 1/086 Protective screens, e.g. all weather or wind screens
• CPC Class Codes: H04R 19/005 using semiconductor materials
• CPC Class Codes: H04R 19/04 Microphones H04R19/01 takes precedence

Abstract

A MEMS microphone includes a cover, a housing engaging with the cover for forming a cavity. The housing includes a base and a sidewall extending perpendicularly from the base. A conductive case is provided to cover the cover and the sidewall of the housing. The base defines a periphery portion outside of the cavity for forming a step, and the conductive case locates a bottom end thereof on the step.

Claims

1. A MEMS microphone, comprising:

a cover;

a housing engaging with the cover for forming a cavity, the housing comprising a base and a sidewall extending perpendicularly from the base;

at least one transducer accommodated in the cavity, the transducer having a back volume; and

a conductive case covering the cover and the sidewall of the housing;

wherein the base defines a periphery portion outside of the cavity for forming a step, and the conductive case locates a bottom end thereof on the step.

2. The MEMS microphone as described in claim 1, wherein the cover defines an acoustic hole for receiving acoustic signals.

3. The MEMS microphone as described in claim 2, wherein the transducer is mounted on the cover and overlaps at least a portion of the acoustic hole.

4. The MEMS microphone as described in claim 2, wherein the back volume of the transducer communicates with the acoustic hole.

5. The MEMS microphone as described in claim 2, wherein the conductive case defines an acoustic aperture communicating with the acoustic hole.

6. The MEMS microphone as described in claim 1, wherein the cover is a printed circuit board, and the housing defines circuits embedded therein for electrically connecting with the cover.

7. The MEMS microphone as described in claim 1, wherein the cover defines a recess and the sidewall of the housing defines a protrusion for engaging with the recess.

8. The MEMS microphone as described in claim 1, wherein the sidewall of the housing defines a recess and the cover defines a protrusion for engaging with the recess.

9. The MEMS microphone as described in claim 6, wherein the cover defines a first group of terminals for electrically connecting with the circuits in the sidewall of the housing and a second group of terminals for electrically connecting with the transducer.

10. A MEMS microphone, comprising:

a cover defining an acoustic hole;

a housing engaging with the cover for forming a cavity therebetween;

at least one transducer accommodated in the cavity;

a conductive case covering the cover and the housing for forming a shield;

wherein the housing defines a base and a sidewall extending perpendicularly from a portion at a distance from the most periphery portion of the base, and the conductive case locates a bottom end thereof on a part between the most periphery portion and the sidewall.

11. The MEMS microphone as described in claim 10, wherein the transducer includes a MEMS die and a controlling chip both mounted on the cover and the MEMS die overlaps at least a portion of the acoustic hole.

12. The MEMS microphone as described in claim 10, wherein the conductive case defines an acoustic aperture communicating with the acoustic hole.

13. The MEMS microphone as described in claim 10, wherein the cover defines a recess and the sidewall of the housing defines a protrusion for engaging with the recess.

14. The MEMS microphone as described in claim 10, wherein the sidewall of the housing defines a recess and the cover defines a protrusion for engaging with the recess.

15. The MEMS microphone as described in claim 11, wherein the MEMS die defines a back volume communicating with the acoustic hole.

16. The MEMS microphone as described in claim 11, wherein the cover is a printed circuit board and the housing defines circuits embedded therein for electrically connecting with the cover and the controlling chip.

17. The MEMS microphone as described in claim 16, wherein the cover defines a first group of terminals for electrically connecting with the circuits in the sidewall of the housing and a second group of terminals for electrically connecting with the controlling chip.

18. A MEMS microphone, comprising:

a cover;

a base opposed from the cover;

a sidewall located between the cover and the base, with two ends thereof connecting with the sidewall and the cover respectively;

a cavity formed by the base, the sidewall and the cover;

at least one transducer accommodated in the cavity;

a conductive case covering the sidewall;

wherein one of the cover and the base defines a portion outside of the cavity for forming a step, and the conductive case locates a bottom end on the step.