PRECURSOR DELIVERY SYSTEM

• US 20100322604A1
• Filed: 04/19/2010
• Published: 12/23/2010
• Est. Priority Date: 10/10/2006
• Status: Active Grant

• Current Assignee: ASM IP Holding B.V. (ASM International NV)
• Original Assignee: ASM America Incorporated (ASM International NV)
• Inventors: Shero, Eric, White, Carl L., Fondurulia, Kyle, Verghese, Mohith E.
• Granted Patent: US 8,986,456 B2
• Time in Patent Office: Days
• US Class Current: 392/451
• CPC Class Codes: C23C 16/4481 by evaporation using carrier gas in contact with the source material C23C16/4486 takes precedence

Abstract

A precursor source vessel for providing vaporized precursor to a reaction chamber is provided. The precursor source vessel includes a lid having a first port, a second port, and a third port. The precursor source vessel also includes a base removably attached to the lid. The base includes a recessed region formed therein. One of the first, second, and third ports is a burp port configured to relieve the head pressure within the source vessel after the source vessel is installed but prior to use of the source vessel in semiconductor processing.

Claims

1. A precursor source vessel comprising:

a lid having an inlet port, an outlet port, and a burp port; and

a base removably attached to said lid, said base having a recessed region formed therein.

2. The precursor source vessel of claim 1, wherein said recessed region includes an inlet recessed pad, an outlet recessed pad, a burp recessed pad, and a channel fluidly connecting each of said pads.

3. The precursor source vessel of claim 2, wherein said channel includes a plurality of linear sections.

4. The precursor source vessel of claim 3, wherein at least two of said linear sections are adjacent and substantially parallel.

5. The precursor source vessel of claim 2, wherein said channel includes a plurality of arced sections.

6. The precursor source vessel of claim 5, wherein at least two of said arced sections are adjacent and substantially concentric.

7. The precursor source vessel of claim 1 further comprising a valve assembly operatively connected to each of said ports.

8. The precursor source vessel of claim 7, wherein each of said valve assemblies is directly connected to said lid.

9. The precursor source vessel of claim 1 further comprising a valve operatively connected to each of said ports, wherein each of said valves is mounted flush with an upper surface of said lid.

10. The precursor source vessel of claim 1, wherein said recessed region includes a channel fluidly connecting said inlet port, said outlet port, and said burp port.

11. The precursor source vessel of claim 10, wherein said channel is a tortuous pathway.

12. A precursor source vessel comprising:

a base having a recessed region formed therein, said recessed region configured to receive a precursor material;

a lid removably attached to said base, said lid having an inlet port, an outlet port, and a burp port; and

a burp valve operatively attached to said lid, and wherein said burp valve is operatively connected to said burp port.

13. The precursor source vessel of claim 12 further comprising a burp filter mounted flush with an upper surface of said lid adjacent to said burp port.

14. The precursor source vessel of claim 12, wherein said burp port is directly fluidly connected to a burp gas line that bypasses a reaction chamber.

15. A precursor source vessel comprising:

a base having a bottom surface, a contact surface, a side surface extending between said contact and bottom surfaces, and an inner surface extending from said contact surface to define a recessed region within said base;

a lid removably attached to said base, said lid having an inlet port, an outlet port, and a burp port.

16. The precursor source vessel of claim 15, wherein said lid includes an upper surface, a lower surface, and a side surface extending between said upper and lower surfaces, and wherein said lower surface of said lid is in an abutting relationship with said contact surface of said base when said lid is attached to said base.

17. The precursor source vessel of claim 16 further comprising an interior volume defined between said inner surface of said base and said lower surface of said lid.

18. The precursor source vessel of claim 15, wherein said recessed region provides a fluid pathway between said inlet port and said outlet port.

19. The precursor source vessel of claim 18 wherein said recessed region includes at least an inlet recessed pad, an outlet recessed pad, and a channel fluidly connecting said inlet and outlet recessed pads.

20. The precursor source vessel of claim 19, wherein said channel includes a plurality of linear sections.

21. The precursor source vessel of claim 20, wherein at least two of said linear sections are adjacent and substantially parallel.

22. The precursor source vessel of claim 19, wherein said channel includes a plurality of arced sections.

23. The precursor source vessel of claim 22, wherein at least two of said arced sections are adjacent and substantially concentric.

24. The precursor source vessel of claim 15 further comprising a heating assembly disposed within said base.

25. A precursor source vessel comprising:

a lid having a first port, a second port, and a third port; and

a base removably attached to said lid, said base having a recessed region formed therein.