OZONE SUPPLYING METHOD AND OZONE SUPPLIER
First Claim
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1. An ozone supplier comprising:
- a mixer which dissolves an oxygen-ozone mixed gas in a fluorine-based solvent to produce a mixed solution,an undissolved gas removing device which removes an undissolved gas from the mixed solution, anda deaerator which extracts an ozone-containing gas, which is dissolved in the mixed solution subjected to removal of the undissolved gas, from the mixed solution.
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Abstract
An ozone supplier 11 of the present invention includes a mixer 1 which dissolves an oxygen-ozone mixed gas in a fluorine-based solvent to produce a mixed solution, an undissolved gas removing device 2 which removes an undissolved gas from the mixed solution, and a deaerator 3 which extracts an ozone-containing gas, which is dissolved in the mixed solution subjected to removal of the undissolved gas, from the mixed solution.
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Citations
12 Claims
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1. An ozone supplier comprising:
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a mixer which dissolves an oxygen-ozone mixed gas in a fluorine-based solvent to produce a mixed solution, an undissolved gas removing device which removes an undissolved gas from the mixed solution, and a deaerator which extracts an ozone-containing gas, which is dissolved in the mixed solution subjected to removal of the undissolved gas, from the mixed solution. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. An ozone supplying method comprising:
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dissolving an oxygen-ozone mixed gas in a fluorine-based solvent to produce a mixed solution, removing an excess gas which remains undissolved in the fluorine-based solvent, and deaerating an ozone-containing gas dissolved in a liquid component in the mixed solution subjected to removal of the excess gas.
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11. An ozone supplying method comprising:
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dissolving an oxygen-ozone mixed gas in a fluorine-based solvent under a pressure to produce a mixed solution, removing an excess gas which remains undissolved in the fluorine-based solvent, and deaerating an ozone-containing gas dissolved in a liquid component by depressurizing the mixed solution subjected to removal of the excess gas.
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12. An ozone supplying method comprising:
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dissolving an oxygen-ozone mixed gas in a fluorine-based solvent under cooling to produce a mixed solution, removing an excess gas which remains undissolved in the fluorine-based solvent, and deaerating the ozone-containing gas dissolved in a liquid component by heating the mixed solution subjected to removal of the excess gas.
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Specification