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OZONE SUPPLYING METHOD AND OZONE SUPPLIER

  • US 20100322844A1
  • Filed: 06/22/2010
  • Published: 12/23/2010
  • Est. Priority Date: 06/23/2009
  • Status: Abandoned Application
First Claim
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1. An ozone supplier comprising:

  • a mixer which dissolves an oxygen-ozone mixed gas in a fluorine-based solvent to produce a mixed solution,an undissolved gas removing device which removes an undissolved gas from the mixed solution, anda deaerator which extracts an ozone-containing gas, which is dissolved in the mixed solution subjected to removal of the undissolved gas, from the mixed solution.

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