METHOD AND SYSTEM OF USING NANOTUBE FABRICS AS JOULE HEATING ELEMENTS FOR MEMORIES AND OTHER APPLICATIONS

• US 20100327247A1
• Filed: 09/06/2006
• Published: 12/30/2010
• Est. Priority Date: 09/06/2005
• Status: Active Grant

• Current Assignee: Nantero Incorporated
• Original Assignee: Nantero Incorporated
• Inventors: Ward, Jonathan W., Segal, Brent M., Rueckes, Thomas, Meinhold, Mitchell
• Granted Patent: US 8,525,143 B2
• Time in Patent Office: Days
• US Class Current: 257/2
• CPC Class Codes: B82Y 10/00 Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
• CPC Class Codes: G11C 13/0004 comprising amorphous/crystalline phase transition cells
• CPC Class Codes: G11C 13/025 using fullerenes, e.g. C60, or nanotubes, e.g. carbon or silicon nanotubes
• CPC Class Codes: G11C 2213/81 Array wherein the array conductors, e.g. word lines, bit lines, are made of nanowires
• CPC Class Codes: H10B 63/30 comprising selection components having three or more electrodes, e.g. transistors
• CPC Class Codes: H10N 70/231 based on solid-state phase change, e.g. between amorphous and crystalline phases, Ovshinsky effect
• CPC Class Codes: H10N 70/823 adapted for essentially horizontal current flow, e.g. bridge type devices
• CPC Class Codes: H10N 70/826 adapted for essentially vertical current flow, e.g. sandwich or pillar type devices
• CPC Class Codes: H10N 70/8613 Heating or cooling means other than resistive heating electrodes, e.g. heater in parallel
• CPC Class Codes: H10N 70/8828 Tellurides, e.g. GeSbTe

Abstract

Methods and systems of using nanotube elements as joule heating elements for memories and other applications. Under one aspect, a method includes providing an electrical stimulus, regulated by a drive circuit, through a nanotube element in order to heat an adjacent article. Further, a detection circuit electrically gauges the state of the article. The article heated by the nanotube element is, in preferred embodiments, a phase changing material, hi memory applications, the invention may be used as a small-scale CRAM capable of employing small amounts of current to induce rapid, large temperature changes in a chalcogenide material. Under various embodiments of the disclosed invention, the nanotube element is composed of a non-woven nanotube fabric which is either suspended from supports and positioned adjacent to the phase change material or is disposed on a substrate and in direct contact with the phase change material. A plurality of designs using various geometric orientations of nanotube fabrics, phase change materials, and drive and detection circuitry is disclosed. Additionally, methods of fabricating nanotube heat emitters are disclosed.

Claims

1. A method of heating an article comprising:

positioning a nanotube element with predefined geometry in proximity to and in thermal communication with an article to be heated;

electrically stimulating the nanotube element with a predefined electrical signal to induce the emission of a predefined amount of heat over a predefined period of time.

2. The method of claim 1, wherein the nanotube element is separated from the article to be heated by a gap of predefined dimensions.

3. The method of claim 1, wherein the nanotube element is in physical contact with a surface of the article to be heated.

4. The method of claim 1, wherein the nanotube element comprises a non-woven fabric of unaligned nanotubes.

5. The method of claim 1, wherein a current less than about 100 μ

A applied to the nanotube element induces a change in temperature greater than about 100 Kelvin over a time period of less than about 1 picosecond.

6. A circuit comprising:

a phase changing material having a plurality of physical states, each state activatable in response to heat stimulus;

a detection circuit in electrical communication with the phase changing material to detect the physical state of said material;

a heat emitting element adjacent to the phase changing material to emit heat in response to an electrical stimulus;

wherein said heat emitting element includes a nanotube element in thermal communication with the phase changing material and capable of transforming the physical state of said material in response to electrical stimulus.

7. The circuit of claim 6, wherein the nanotube element comprises a network of unaligned nanotube segments which generally extend along a length of the element.

8. The circuit of claim 6, wherein the nanotube element comprises a non-woven fabric of unaligned nanotubes.

9. The circuit of claim 7, wherein the network of unaligned nanotube segments comprises single-walled nanotubes.

10. The circuit of claim 7, wherein the network of unaligned nanotube segments comprises multi-walled nanotubes.

11. The circuit of claim 6, further including a support structure defining a gap

wherein:

the phase changing material is positioned within the gap;

the nanotube element is supported by the support structure and suspended over the gap;

the suspended portion of the nanotube element is the heat-emitting active region; and

the nanotube element is suspended by the support structure in a fixed spaced relation to and thermal communication with the phase changing material.

12. The circuit of claim 11, wherein the suspended portion of the nanotube element extends approximately 130 nm in one dimension and 3 to 5 μ

m in another dimension.

13. The circuit of claim 6, further including a support structure defining a gap wherein:

the phase changing material is positioned within the gap;

the nanotube element is in direct physical contact with the support structure and the phase changing material;

the portion of the nanotube element in direct contact with the phase changing material is the heat-emitting active region; and

the nanotube element is supported by the support structure and is in thermal and electrical communication with the phase changing material.

14. The circuit of claim 11, wherein the support structure upon which the nanotube element is suspended comprises one or more materials whose electrical properties are insulating and whose thermal properties are less thermally conductive than the nanotube element.

15. The circuit of claim 13, wherein the support structure upon which the nanotube element is disposed comprises one or more materials whose electrical properties are insulating and thermal properties are less thermally conductive than the nanotube element.

16. The circuit of claim 13, the support structure is interposed between the active region of the nanotube heating element and the phase changing material.

17. The circuit of claim 6, wherein the nanotube element is generally extended perpendicularly to the major surface of the substrate.

18. The circuit of claim 6, wherein the nanotube element is generally extended in an orientation parallel to the major surface of the substrate.

19. The circuit of claim 6, wherein the detection circuit comprises at least two conductive electrodes in electrical communication with the phase changing material and capable of using an electrical stimulus to measure an electrical resistance of the phase changing material, wherein said electrodes are not in electrical communication with the nanotube element.

20. The circuit of claim 6, wherein the detection circuit comprises at least two conductive electrodes capable of applying electrical stimulus to the nanotube element and measuring the resistance of the phase changing material.

21. The circuit of claim 6, wherein the phase changing material is in thermal and electrical communication with a second nanotube element spatially separated from the previously mentioned nanotube element by a support structure.

22. The circuit of claim 6, wherein the phase-changing material comprises a chalcogenide capable of at least two memory states.

23. A method of making a heat sensitive memory circuit, the method comprising:

providing a substrate with a defined portion of phase change material;

forming a nanotube element in proximity to the phase change material; and

providing a drive circuit in electrical communication with the nanotube element to electrically stimulate the nanotube element and induce said element to generate heat.