METHOD AND SYSTEM FOR CONTROLLING RADIO FREQUENCY POWER
First Claim
1. A method for controlling pulsed power, comprising:
- measuring a first pulse of delivered power from a power amplifier to obtain data;
generating a first signal to adjust a second pulse of delivered power, the first signal correlated to the data to minimize a power difference between a power set point and a substantially stable portion of the second pulse; and
generating a second signal to adjust the second pulse of delivered power, the second signal correlated to the data to minimize an amplitude difference between a peak of the second pulse and the substantially stable portion of the second pulse.
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Abstract
A method for controlling pulsed power that includes measuring a first pulse of power from a power amplifier to obtain data. The method also includes generating a first signal to adjust a second pulse of delivered power, the first signal correlated to the data to minimize a power difference between a power set point and a substantially stable portion of the second pulse. The method also includes generating a second signal to adjust the second pulse of delivered power, the second signal correlated to the data to minimize an amplitude difference between a peak of the second pulse and the substantially stable portion of the second pulse.
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Citations
48 Claims
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1. A method for controlling pulsed power, comprising:
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measuring a first pulse of delivered power from a power amplifier to obtain data; generating a first signal to adjust a second pulse of delivered power, the first signal correlated to the data to minimize a power difference between a power set point and a substantially stable portion of the second pulse; and generating a second signal to adjust the second pulse of delivered power, the second signal correlated to the data to minimize an amplitude difference between a peak of the second pulse and the substantially stable portion of the second pulse. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A method of power delivery, comprising:
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delivering power from a power delivery system in a continuous-wave mode to a load; generating a signal in a feedback loop to control the delivered power, the signal correlated to a power control algorithm; and adjusting a single variable in the power control algorithm to transition the delivered power from the continuous-wave mode to a pulsed mode. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18, 19)
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20. A method of power delivery, comprising:
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delivering power from a power delivery system in a continuous-wave mode to a load; measuring power delivered to the load; generating a signal indicative of the power delivered using a feedback loop to control amplitude of the power delivered, the signal corresponding to a power control algorithm; adjusting a single variable in the power control algorithm to deliver pulsed power to the load via the same feedback loop. - View Dependent Claims (21, 22, 23, 24, 25, 26, 27, 28, 29)
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30. A system for delivering pulsed or continuous-wave RF power to a load, comprising:
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a voltage to power converter coupled to an output of a voltage source, the voltage to power converter adapted to generate the pulsed RF power or the continuous-wave RF power; a RF power amplifier coupled to an output of the voltage to power converter, the RF power amplifier adapted to deliver RF power to the load; a pulse shape control loop coupled to an output of the RF power amplifier and a first input of the voltage source, the pulse shape control loop adapted to minimize an amplitude difference between a peak of the pulsed power and a substantially stable portion of the pulsed power, the pulse shape control loop adapted to operate when the pulsed RF power is in a first mode; and a power set point control loop coupled to the output of the RF power amplifier and a second input of the voltage source, the power set point control loop adapted to minimize a power difference between a RF power set point and the RF power delivered to the load. - View Dependent Claims (31, 32, 33, 34, 35, 36, 37, 38)
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39. A system for delivering pulsed or continuous-wave RF power to a load, comprising:
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a voltage to power converter coupled to an output of a voltage source, the voltage to power converter adapted to produce the pulsed RF power or the continuous-wave RF power; a RF power amplifier coupled to an output of the voltage to power converter, the RF power amplifier adapted to deliver RF power to the load; a first control circuit coupled to an output of the RF power amplifier and a current set point output; and a second control circuit coupled to an input of the voltage source and an output of the voltage source, the second control circuit in electrical communication with the current set point output, wherein the first and second control circuits, in combination, are adapted to minimize a power difference between a RF power set point and the RF power delivered to the load. - View Dependent Claims (40, 41, 42, 43, 44, 45, 46, 47, 48)
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Specification